Nihon Dempa Kogyo Co., Ltd.

Tanaka Kikinzoku Kogyo K.k.

Kenichi Ueki

Toshinori Ogashiwa

Takeyuki Sagae

Katsunori Akane

Masaaki Kurita

Takashi Terui

Kenzo Okamoto

Shohei Takeda

An electrode material capable of making more satisfactory the dispersion at the time of production and the aging property of a resonator than Au and capable of reducing the price as compared to Au. An resonator electrode material including a ternary alloy composed of Au and two metals Mand M, and being used as an excitation electrode to excite oscillation in a piezoelectric element, wherein the two metals Mand Mare, respectively, (a) metal M: a metal exhibiting a tendency to decrease the temporal frequency property (&#x394;f/f) from the reference value f, and (b) metal M: a metal exhibiting a tendency to increase the temporal frequency property (&#x394;f/f) from the reference value f. The metal Mis preferably at least any one of Ag, Al and Ni, and the metal Mis preferably at least any one of Pd, Ru, Pt, Ir, Rh and Cu.

Resonator electrode material excellent in aging property, piezoelectric resonator using the same material, and sputtering target made of the same material

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Sayama, Japan

Kenichi Ueki