Tokyo Electron Limited

Tokyo Electron Limi Ted

Kenichi Narikawa

Katsuaki Sugiyama

Hiroshi Yamada

Jun Fujihara

Tomoya Endo

Kentaro Konishi

Takanori Hyakudomi

Hiroaki Hayashi

Tetsuya Kagami

Michio Murata

Shin Uchida

Xingjun Jiang

Hiroki Shikagawa

Shingo Morita

Yukinori Murata

Takumi Nagura

Rika Ozawa

Shigeki Ishii

Koji Shinagawa

A testing system includes: an inspection module including a plurality of levels of inspection chambers in each of which a tester part having a tester configured to perform an electrical inspection of an inspection object and a probe card is accommodated; an aligner module configured to align the inspection object with the tester part; an alignment area in which the aligner module is accommodated; and a loader part configured to load the inspection object into the alignment area and unload the inspection object out of the aligner module, wherein the inspection module is located adjacent to the alignment area.

Testing system

A voltage application device of a tester includes a voltage setting controller that sets a number of transient steps, step time, and step voltage as transient voltage setting parameters; and a device power supply (DPS) configured to supply power to the plurality of devices under test formed on a substrate. The voltage application device outputs an output voltage having a step-like transient voltage waveform based on the transient voltage setting parameters set by the voltage setting controller. The voltage application device is a high-order lag system of a second-order or higher in which an overshoot occurs in a response with respect to a set voltage. An end point of a step time of each of the transient steps set in the voltage setting controller is set to be a time between an end point of a rising time and an overshoot time.

Voltage application device for testing plurality of devices and method of forming output voltage waveform

There is provided a device inspection circuit capable of measuring currents flowing through a plurality of devices without increasing the cost. A power supply circuit of a box-side inspection circuit includes an operational amplifier and a sense resistor. A power source having a current measuring function, the operational amplifier, the sense resistor and a DUT are connected in series in this order. The power source is connected to a non-inverting input terminal of the operational amplifier. The power supply circuit further includes a negative feedback channel configured to apply a voltage between the sense resistor and the DUT to an inverting input terminal of the operational amplifier, and a positive feedback channel configured to connect an upstream sense point between the operational amplifier and the sense resistor and the non-inverting input terminal of the operational amplifier. The positive feedback channel includes a feedback resistor installed therein.

Device inspection circuit, device inspection device, and probe card

A substrate inspection apparatus can efficiently inspect electric characteristics of the semiconductor device. A proberincludes a probe cardhaving a multiple number of probe needlesto be brought into contact with electrodes of a semiconductor device formed on a wafer W; and a test boxelectrically connected to the probe card. A card-side inspection circuit of the probe cardreproduces a circuit configuration on which the semiconductor device is to be mounted after separated from the wafer W, e.g., the circuit configuration of a function extension card, and a box-side inspection circuitof the test boxreproduces a circuit configuration on which the semiconductor device is to be mounted, e.g., a part of the circuit configuration of the mother board.

Substrate inspection apparatus

Growing community of inventors

Nirasaki, Japan

Kenichi Narikawa