Mitutoyo Corporation

Kenichi Nakayama

Shozaburo Tsuji

Osamu Kawatoko

Satoshi Adachi

Toshihiro Hasegawa

Hirokazu Kobayashi

Toshihiko Aoki

Toshiharu Miyata

Atsushi Tominaga

Hiroto Kubozono

Akihito Takahashi

Masaaki Nagata

An inductive detection encoder according to the present invention includes: first and second members which are oppositely disposed so as to relatively move in a measurement direction; a transmitting coil formed in the first member; a magnetic flux coupled body which is formed in the second member and coupled with a magnetic field generated by the transmitting coil; and a receiving coil formed in the first member and having receiving loops. At least one of the transmitting coil and the receiving coil has a specific pattern that impairs the uniformity and periodicity of a pattern; and a dummy pattern formed in a position corresponding to a specific phase relationship of a cycle generated by the track with respect to the specific pattern.

Inductive detection encoder and digital micrometer

The invention provides a highly accurate and inexpensive electromagnetic induction type encoder capable of acquiring strong signal intensity with the offset reduced by a short scale coil, and is durable against fluctuations in the yaw direction, which includes a number of scale coilsarrayed on a scalealong the measurement direction, and transmitting coilsand receiving coilsthat are disposed on a gridrelatively movably in the measurement direction with respect to the scale, and which detects a relative movement amount of the scale and the grid from changes in magnetic fluxes detected by the receiving coils via the scale coil when the transmitting coils are magnetized, wherein a plurality of sets of the transmitting coils (A,B), the receiving coils (A,B) and the scale coils (A,B) are disposed symmetrically with respect to the center of the scale, and scale coils of one set located at a symmetrical position around the center of the scale is disposed with &#xbd; phase of the scale pitch shifted with respect to scale coils of the other set.

Electromagnetic induction type encoder

An inductive displacement detector of a rotary type is disclosed, which includes a first flux coupling winding and a second flux coupling winding alternately arranged on a rotor. The first flux coupling winding has a line conductor crossed. The second flux coupling winding has a line conductor not crossed. In the first and second flux coupling windings the transmission conductors thereof share a side.

Inductive displacement detector and micrometer

Each of first scale coils arranged at a cyclic interval &lgr; /2 of a magnetic encoder is connected by each of connecting wires to a corresponding one of second scale coils arranged at a different cyclic interval &lgr; /2 thereof. Each of the connecting wires includes two parallel conductors placed in such a way as to be close to each other. The connecting wires are set so that at any position on the scale, the length of the connecting wire has an equal value. Thus, the signal levels of received signals, which are attenuated by electric currents flowing through the two conductors in opposite directions, can be controlled in such a manner as to be equal to each other. Consequently, the influence of the position of a detection coil on the scale, which is exerted on the signal level of the received signal, is reduced.

Magnetic encoder

A transmission electrode and a detection electrode are placed in an electrode section of a sensor and are capacity-coupled with a reception electrode placed on an opposed scale. Capacity change between the transmission electrode and the reception electrode caused by displacement is detected with the detection electrode . A plurality of signals different in phase are supplied to the transmission electrode . The signal lines are wired like a zigzag using an upper layer and a lower layer and the distances between the signal lines and the detection electrode are made substantially equal for making uniform the crosstalk amounts relative to the detection electrode

Capacitance type displacement detection apparatus

Both a sensor portion and a signal processing portion are provided on a glass board. The sensor portion is formed by subjecting a conductive layer to the patterning process. A gold coupling layer is provided on the conductive layer and the signal processing portion is formed by the flip chip method on the coupling layer. The sensor portion and the signal processing portion may be formed on the major surface and the rear surface of the glass board and these portions may be coupled by through holes. Since the signal processing portion as well as the sensor portion is formed on the glass board, the wiring distance can be made shorter and the entire size of the sensor can be miniaturized.

Capacitance type displacement detection apparatus and method of manufacturing the same

An electrostatic capacitive encoder includes a scale and a sensor head, which is arranged opposing to and relatively movable to the scale. A plurality of protrusions for sliding, processed in a certain pattern, are located on a flat region surrounding a transmitting electrodes and receiving electrodes of the sensor head.

Growing community of inventors

Miyazaki, Japan

Kenichi Nakayama