Alps Electric Co., Ltd.

Other

Organo Corporation

Frontec Incorporated

National Institute of Advanced Industrial Science and Technology

Tadahiro Ohmi and Organo Corporation

Kenichi Mitsumori

Yasuhiko Kasama

Tadahiro Ohmi

Takashi Imaoka

Nobuaki Haga

Akira Abe

Oh Eui Yeol

Masayuki Toda

Kinji Asaka

Tomomasa Takatsuka

Takushi Sugino

Koji Yamanaka

Isao Takahashi

Akira Nakano

Junichiro Soejima

Shoichi Ono

Satoshi Miyazawa

Masami Ikarashi

Norihisa Takahashi

Akio Fujie

Mineo Iwasaki

Takayuki Imaoka

Eui-Yeol Oh

Mitsuru Kano

Jun Nakanowatari

Yoshinori Kato

Hitoshi Seki

Yorihiko Sasaki

Masahiko Yamaguchi

Koji Kikuchi

Teppei Sugawara

Yasuhiro Miki

Tomoo Kamigaki

Takemi Akimoto

An object of this invention is to create an actuator in which the amount of deformation is maintained and no displacement in the reverse direction occurs, even when a constant voltage is continuously applied for a long period of time. As a means for achieving the above object, the invention provides a conductive thin film comprising a polymer gel containing at least one organic molecule selected from the group consisting of electron-donating organic molecules and electron-withdrawing organic molecules, a nano-carbon material, an ionic liquid, and a polymer.

Actuator element using carbon electrode

A polymer actuator element includes an electrolyte layer and electrode layers, in which the electrode layer includes an activated carbon nanofiber and a carbon nanohorn.

Polymer actuator element

A polymer actuator device system includes: a polymer actuator which includes an electrolyte layer, a first electrode layer and a second electrode layer provided to oppose each other with the electrolyte layer interposed therebetween in a thickness direction of the electrolyte layer, and deforms in response to a voltage between the first and second electrode layers; and a sealing member which coats an entirety of the polymer actuator to be enclosed therein. The sealing member has two layers of a resin layer and an inorganic layer, a thickness of the sealing member is 1 to 5 microns, and an outer side of the sealing member in the thickness direction has a wear preventing body.

Polymer actuator device system

The wet treatment liquid feed nozzle of the invention comprises an introducing pathhaving an introducing porta discharging pathhaving a discharging porta crossing sectionformed by causing the introducing pathand the discharging pathto cross at the other ends thereof, a nozzle assemblyhaving an opening sectionopening to an object to be treatedprovided at the crossing sectionand pressure control meansfor controlling the difference between the pressure of the wet treatment liquid in contact with the object to be treatedand the atmospheric pressure provided at least on the discharging pathside so that the wet treatment liquid having been in contact with the object to be treatedvia the opening sectiondoes not flow to outside the discharging path

Liquid feed nozzle, wet treatment, apparatus and wet treatment method

The wet treatment liquid feed nozzle of the invention comprises an introducing path having an introducing port, a discharging path having a discharging port, a crossing section formed by causing the introducing path and the discharging path to cross at the other ends thereof, a nozzle assembly having an opening section opening to an object to be treated, provided at the crossing section, and pressure control means, for controlling the difference between the pressure of the wet treatment liquid in contact with the object to be treated and the atmospheric pressure provided at least on the discharging path side so that the wet treatment liquid having been in contact with the object to be treated via the opening section does not flow to outside the discharging path.

Liquid feed nozzle, wet treatment apparatus and wet treatment method

A second housing whose center portion is depressed and whose end portion around the center portion is formed like a visor is arranged around a first housing whose center portion is depressed and whose end portion around the center portion is formed like a visor, and a hollow portion is formed between the first housing and the second housing by sandwiching a packing between the end portions of the housings. Further, degassed water for preventing empty heating is filled in the hollow portion, and an ultrasonic transducer is placed on the surface of the center portion of the first housing. A weight for preventing the vibration of the wall is provided on the wall surface of the second housing. Since the vibration of the wall of the housing is suppressed by the weight, vibration energy returns toward the bottom surface of the center of the housing through water and is radiated from the bottom surface efficiently as ultrasonic waves.

Ultrasonic cleaner and wet treatment nozzle comprising the same

An electroless copper plating method is provided having a first catalyst step of forming a first catalyst layer on a ceramic base material containing a glass component using a tin chloride solution and a palladium chloride solution; a pre-copper-plating heat treatment step of heating the ceramic base material in an atmosphere containing oxygen; a laminate catalyst treatment step of forming a laminate catalyst layer on the ceramic base material using a tin chloride solution and a palladium chloride solution; a plating treatment step of forming a copper plating film on the ceramic base material using a copper plating solution containing a small amount of nickel ions; and a post-copper-plating heat treatment step of heating the ceramic base material at a heat treatment temperature not more than the glass transition temperature thereof.

Plating substrate, electroless plating method, and circuit forming method using the same

A wet treatment apparatus includes a nozzle having an approximately rectangular introduction opening surface that is open toward a substrate to be treated and an approximately rectangular recovery opening surface that is open toward the substrate, these opening surfaces being flush with each other and disposed with the long side directions thereof in parallel with each other. A treatment liquid is introduced between the introduction opening surface and the surface to be treated of the substrate and is sucked and recovered from between the recovery opening surface and the surface to be treated of the substrate. The flow rate of the treatment liquid flowing from the introduction opening surface to the recovery opening surface through the surface to be treated of the substrate is controlled to 0.02 to 0.3 L/min per 1 cm in the long side direction of the introduction opening surface. With this arrangement, there can be provided a wet treatment apparatus capable of using a liquid saving type nozzle under optimum conditions.

Wet treatment apparatus

Deionized water from a deionized water source ( ) for electrolysis is supplied by a pressurizing pump ( ) to an electrolyzer ( ) to obtain a hydrogen gas and ozone gas by means of electrolysis. The pressures of these gasses are maintained at not less than the atmospheric pressure. These gasses at a pressure of the atmospheric pressure or more are dissolved in high-purity water in gas dissolving units ( ) to obtain ozone water and hydrogen water respectively. These ozone water and hydrogen water are introduced into mixer ( ) to adjust pH respectively. In this way, highly-concentrated, gas dissolved cleaning solution is prepared in a short period of time.

Method for preparing cleaning solution

Disclosed is a drying nozzle for realizing a high-efficiency drying device capable of drying an object to be processed to a sufficient degree. The drying nozzle includes a drying gas supply portion having an air supply tube for supplying air for drying a substrate whose surface is wet with a liquid by being sprayed against the surface of the substrate, and a gas/liquid mixture discharge portion which is spaced apart from the surface of the substrate by a predetermined distance to thereby make the thickness of the liquid adhering to the surface of the substrate prior to the drying constant and which has a porous material having a large number of through-holes for discharging the air/liquid mixture consisting of air and the liquid,from the surface of the substrate, the drying gas supply portion and the gas/liquid mixture discharge portion being arranged along the surface of the object so as to be adjacent to each other.

Drying nozzle and drying device and cleaning device using the same

A gas solution producing device having a simple structure to reduce a start-up time, and capable of reducing an amount of gas or solution for use, and a method therefor, as well as a cleaning device employing them. An ozone water solution producing device of the present invention includes a gas dissolving module for bringing ozone gas and deionized water in contact with each other for production of ozone solution, a gas introducing pipe for introducing ozone gas from an ozone gas producing device to the gas dissolving module, a buffer, connected on the gas introducing pipe, for temporarily storing ozone gas and thereafter discharging the gas stored to the gas introducing pipe, a first valve for opening or closing the gas introducing pipe to switch introduction and suspension of gas flow to the gas dissolving module, and backflow prevention valve for preventing a backflow of the gas discharged from the buffer.

Device and method for producing gas solution and cleaning device

There are provided a method and an apparatus for removing electrostatic charges from high resistivity liquid. An insulating film is formed on the surface of a conductive element which is in contact with the high resistivity liquid wherein the insulating film has such a thickness that a tunneling current may flow through the insulating film, thereby preventing the highly purified high resistivity liquid from being contaminated, as well as from becoming acid. Thus, objects to be treated with the high resistivity liquid become free of electrostatic charges without any contamination.

Apparatus for removing electrostatic charge from high resistivity liquid

Growing community of inventors

Miyagi-ken, Japan

Kenichi Mitsumori