Kokusai Electric Corporation

Kawada Kogyo K.k.

Kenichi Maeda

Akihiro Sato

Masaya Nishida

Nobuhito Shima

Yosuke Kuwata

Tadaki Kawada

There is provided a technique that includes executing a process recipe for processing a substrate; and executing a correction recipe for checking a characteristic value of a supply valve installed at a process gas supply line, wherein the act of executing the correction recipe comprises: supplying an inert gas into the process gas supply line for a certain period of time in a state where an adjusting valve that is installed at an exhaust portion of a process furnace and adjusts an internal pressure of the process furnace is fully opened; detecting a pressure value in a supply pipe provided with the supply valve while supplying the inert gas into the process gas supply line in the state where the adjusting valve is fully opened; and calculating the characteristic value of the supply valve based on the detected pressure value.

Method of manufacturing semiconductor device, method of managing parts, and recording medium

A streamlined box girder type suspension bridge comprises a plurality of towers for supporting the cables, and the center main span and side spans comprising streamlined box girders suspended by a plurality of hangers from the cables. An additional mass of an appropriate weight comprising the material which would not directly contribute to the strength of the box girder is formed as a core at the predetermined portion of the box girder in order to suppress the bending-torsional flutter arising from the streamlined shape of the box girder, and the core extends over the complete span of the bridge symmetrically and with respect to the longitudinal axis thereof.

Streamlined box girder type suspension bridge

Growing community of inventors

Toyama, Japan

Kenichi Maeda