Smc Kabushiki Kaisha

Kenichi Kurosawa

Katsuhiko Odajima

Masatoshi Hatakeyama

A flow controller for controlling a flow rate of a fluid flowing through a fluid passage comprises a control valve for which a degree of opening of a valve is adjusted by a control signal, an orifice arranged on an outflow side of the control valve, a combined sensor arranged on an inflow side of the orifice for almost simultaneously detecting a pressure and a temperature of the fluid, and a control circuit. The combined sensor includes a pressure-detecting element for deriving a detection signal corresponding to the pressure of the fluid, and a temperature-detecting element for deriving a detection signal corresponding to the temperature of the fluid. The pressure-detecting element and the temperature-detecting element are arranged closely to one another on an identical surface of a pressure-receiving section.

Combined sensor and flow controller provided with combined sensor

A suck back valve is equipped with a second valve by which a flow amount of a pressurized fluid, which is sucked by a third diaphragm, is electrically controlled based on an output of activation and deactivation signals from a main controller. The suck back valve further includes an encoder which detects a displacement amount of the third diaphragm, and outputs a detection signal thereof to the main controller.

Suck back valve with sucking amount control mechanism

A suck back valve is equipped with a displacement speed regulating device made up of an ER (Electro-rheological) fluid filled in a chamber and whose viscosity changes in correspondence with the size of an external electric field, a coil member which generates the external electric field in response to an applied voltage, and a constriction which regulates a flow amount of the ER fluid between an upper-side chamber and a lower-side chamber of the chamber.

Suck back valve

A suck back valve is equipped with a first flow amount control device for controlling a pilot pressure supplied to an ON/OFF valve, and a second flow amount control device for controlling a pilot pressure supplied to a suck back mechanism, wherein the first and second flow amount control devices are operated based on activating and deactivating signals output from a main controller.

Growing community of inventors

Matsudo, Japan

Kenichi Kurosawa