Canon Kabushiki Kaisha

Kenichi Kotoku

Kentaro Matsumoto

Masaharu Eguchi

Yoshihiro Shigemura

Yukuo Karube

An exposure apparatus for sequentially performing exposure of device patterns provided in a pattern effective area of a photo-mask ( ) on to shot areas of a wafer ( ), to provide excellent throughput performance, includes an illumination unit ( ) for collectively illuminating the entire pattern effective area of the photo-mask contained within the illumination range with exposure light, a mask stage ( ) that moves the photo-mask for the illumination range in the mask scanning direction, and a wafer stage ( ) that moves the wafer for the projection range in which the pattern effective area of the photo-mask is projected in the wafer scanning direction. A control unit ( ), after containing at least one shot area of the wafer within the projection range to perform exposure of device patterns provided in the pattern effective area of the photo-mask onto the one shot area of the wafer, synchronizes and controls the movements of the mask stage and the wafer stage while keeping the entire pattern effective area of the photo-mask contained within the illumination range.

Exposure apparatus and semiconductor device manufacturing method

A PC card camera has a structure in which a universal joint to which a video camera is attached is mounted on a PC card body. The video camera comprises an optical lens unit and a solid-state area sensor of the photoelectric transducer type. The universal joint holds the video camera in such a manner that the angular position thereof can be adjusted freely with respect to the PC card. The PC card body is provided with a guide for guiding the card into a slot provided in a personal computer, a connector for connecting the PC card to the personal computer, and a cut-out which prevents the PC card from being inserted incorrectly. With the PC card connected to the personal computer, the angular position of the video camera can be adjusted via the universal joint.

Image sensing apparatus including a card device connectable to an information processing device

Image input unit

A semiconductor manufacturing apparatus reduces limitation on operation position due to the layout of a factory, and enables an operator to check data in a working position upon maintenance of the apparatus, thus realizing efficient operation. A console having a display unit to display wafer information, recipe information, apparatus status and the like, and an input unit to input data and information, is removably fixed in any of a plurality of attachment positions provided on the semiconductor manufacturing apparatus main body, via a console attachment member. The height of the display unit and that of the input unit can be adjusted by height adjustment means having band members and fixing members.

Growing community of inventors

Fujisawa, Japan

Kenichi Kotoku