Tokyo Electron Limited

Pioneer Electronic Corporation

Other

Pioneer Corporation

Shizuoka Pioneer Corporation

Snizuoka Pioneer Corporation

Kenichi Kobayashi

Tsutomu Tokunaga

Shigeo Ide

Youichi Nakayama

Hiroyuki Suzuki

Kyoichi Ariga

Ryota Aoi

Kozo Kai

Takehiro Kinoshita

Noriaki Kanaya

Keiichiro Shiki

Hiroshi Ogura

Nobuyuki Muromachi

Mieko Nagamori

Hideki Toshima

Kenji Shirasaka

Takashi Oe

A semiconductor manufacturing system includes: a local operation terminal that displays an apparatus screen of a semiconductor manufacturing apparatus; at least one remote operation terminals that are connected to the semiconductor manufacturing apparatus via a network, and display the apparatus screen; and a controller that controls the semiconductor manufacturing apparatus based on an operation received from a user by the local operation terminal and the remote operation terminal that display the apparatus screen. The control device includes: a login state managing unit; an apparatus screen display state managing unit; and a screen data creating unit that creates screen data of the apparatus screen based on the simultaneous login state and the apparatus screen display state.

Semiconductor manufacturing system, control device, and control method

A processing system includes: a first statistical operator configured to divide data output from each sensor of a target apparatus according to each processing division of a processing performed by the target apparatus, and perform a statistical operation for each processing division; a second statistical operator configured to divide data output from each sensor of a comparative apparatus according to each processing division of the processing performed by the comparative apparatus, and perform a statistical operation for each processing division; a calculator configured to calculate a difference value between a result of the statistical operation performed by the first statistical operator and a result of the statistical operation performed by the second statistical operator, for each processing division; and a display controller configured to display the difference value for each processing division in a graph.

Processing system and method for comparatively analyzing data

A method of lowering a temperature of a substrate table uses a substrate W processing system including a first substrate table; one or more processing chambers, in each of which the first substrate tableis disposed, the processing chamber being configured to perform a predetermined process, with the substrate being placed on the first substrate table; a substrate transfer apparatusconfigured to transfer the substrate to the processing chamber; a transfer chamber in which the substrate transfer apparatusis disposed; and a second substrate table configured to cool the substrate. The method of lowering a temperature of a substrate table comprises the steps of first transfer in which the substrate W placed on the first substrate tableis transferred to the second substrate table by the substrate transfer apparatus, and second transfer in which the substrate placed on the second substrate table is transferred to the first substrate table. By repeating the step of first transfer and the step of second transfer, a heat of the first substrate tableis absorbed by the substrate W placed on the first substrate table, so that a temperature of the first substrate tableis lowered.

Method of lowering temperature of substrate table, computer-readable storage medium, and substrate processing system

A processing system for performing a predetermined process on a target object includes one or more processing apparatuses that process the target object and a controller that controls the processing apparatuses. Here, the controller performs a control to select any one of a shutdown state in which a multiple number of end devices of the processing apparatuses are all stopped and a standby state in which some or all of the end devices are ready to perform a process on the target object, when the controller is shut down.

Target object processing system and method of controlling the same

A drive apparatus for driving a display panel having a plurality of row electrode groups each of which includes a plurality of row electrodes, and a plurality of column electrodes arrayed in the direction intersecting with each row electrode of the plurality of row electrode groups to form display cells at the intersection points. The drive apparatus comprises a controller for generating a control signal for each of the row electrode groups, and a row electrode drive circuit for generating a drive pulse in response to the control signal and supplying the pulse to each row electrode of each of the row electrode groups. The control signal is delayed when being supplied to the drive circuit for each of the row electrode groups.

Display panel drive apparatus

A plasma display panel comprises a selective row electrode Z extending between row electrode pairs (X, Y) adjacent to each other in a column direction. A discharge cell is divided by into two by a second transverse wallB of a partition walldefining the periphery of the discharge cell: a display discharge cell Cprovided opposite transparent electrodes Xa, Ya of the paired row electrodes X, Y for a sustaining discharge, and a reset and addressing discharge cell Cprovided opposite the selective row electrode Z for a reset discharge and an addressing discharge which are created between the electrode Z and a column electrode D. A clearance r is provided for communication between the display discharge cell Cand the reset and addressing discharge cell C

Plasma display panel and method of driving same

A drive circuit of plasma display panel (PDP) unit including at least a pair of electrodes and discharge cells connected thereto, further comprises a first path having a first switch and a first coil for applying voltage to the discharge cells; a second path having a second switch and a second coil for expelling the voltage applied to the discharge cells; and electric charge accumulating devices connected to the first path and the second path, wherein the inductance value of the second coil is larger than the inductance value of the first coil.

Drive circuit of plasma display panel unit

There is provided a metal hydride negative electrode having excellent discharge characteristics at the beginning of a charge and discharge cycle, excellent gas absorptivity during charge, and an excellent cycle life, and a method for producing the same without the need of any complicated producing processes. The metal hydride negative electrode ( ) is used for a nickel hydride cell, and comprises a substrate ( ) and a negative electrode plate ( ) which is formed by applying a hydrogen absorbing alloy composition containing a hydrogen absorbing alloy powder, a conductive material, a binder and a dispersing agent on the substrate, wherein the negative electrode plate has a surface portion ( ) which has a predetermined water repellent rate and a plurality of convex portions.

Metal hydride negative electrode and method for producing same

A plasma display panel has a plurality of row electrodes in pairs, a plurality of column electrodes intersecting with the row electrodes, first driving means for applying a row electrode driving pulse to each of the row electrodes, and second driving means for applying a pixel data pulse to each of the column electrodes. A manual adjusting means is provided for manually adjusting timing of rise edge and/or timing of fall edge of the row electrode driving pulse and/or the pixel data pulse.

Driving system for a plasma display panel

A method for driving a matrix type of plasma display panel displaying an image with a stable display operation in error-discharge free. The last pulse of the discharge-sustaining pulses in the sustained discharge period is adjusted to be shorter than that of the immediately previous pulse of the discharge-sustaining pulses and/or an address-pulse is applied to the column electrode in the simultaneous time of the applying of the discharge-sustaining pulses to generate the discharge between the paired row and column electrodes. The residual wall charges remaining the lightened pixel cell and the darkened pixel cell are uniformed at the end of sustained discharge period so that a stable addressing operation and precise emission displaying associated with the pixel data is achieved in the next addressing period.

Method for driving a plasma display

A method for driving a matrix type of plasma display panel is capable of stably displaying an image in error-discharge free. The plasma display panel including a plurality of row electrodes extending parallel to each other, two adjacent ones of the row electrodes being paired, and a plurality of column electrodes extending perpendicularly to the row electrodes at a given intervals wherein a region in which, one pair of row electrodes and one column electrode are crossed and spaced with a distance to each other at an intersection corresponding to one pixel. The method includes the steps of: applying first resetting pulses to all of the row electrodes simultaneously to cause discharges between all of the pairs of row electrodes, each first resetting pulse including a pulse rise or pulse fall time longer than each duration of the sustain pulse for sustaining a discharge emission as a simultaneous resetting step; applying a second resetting pulse to one of the pair of row electrodes to cause discharge therebetween immediately after applying the first resetting pulse to the one of the pair of row electrodes; applying a scan pulse to every pair of row electrodes and simultaneously applying a pixel data pulse to every column electrode to write pixel data to the associated pixels in accordance with pixel data pulses applied; and applying a series of sustain pulses alternately to one of the row electrode pair and the other thereof to maintain sustain-discharge between the pair of row electrodes.

Growing community of inventors

Yamanashi-ken, Japan

Kenichi Kobayashi