Average Co-Inventor Count = 6.46
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Screen Holdings Co., Ltd. (2 from 1,111 patents)
2 patents:
1. 12255061 - Substrate processing method
2. 12211687 - Substrate treatment apparatus and substrate treatment method