International Business Machines Corporation

Kenichi Imura

Yoshitami Sakaguchi

Daiju Nakano

Tomoyuki Taguchi

Yoshinori Mekata

Daiju Nakanao

To test electrical characteristics of a Thin Film Transistor (TFT) with a source or drain terminal left open and exposed, using a non-contact current source and protecting the TFTs from adverse effects, such as contamination, destruction, and the like. A testeris provided to test a TFT array substrate, the tester including ion flow supply devicesandfor supplying an ion flow onto the surface of a substrate. Thereon, an arrayof TFTs is formed, each TFT being connected to an electrode having a source or a drain left open and exposed; a control circuitfor supplying an operating voltage to a gate electrode of the TFT to be tested in the array; and a measurement circuitfor measuring an operating current via the testing TFT source or drain that remain in a non open state.

Thin film transistor tester and corresponding test method

Provided is an inspection device which inspects a thin film transistor (TFT) for supplying a current to a light emitting element. The inspection device includes: a first current supply circuit which supplies a drain current between a drain and a source of the TFT; a gate voltage adjustment circuit which adjust a gate voltage to be applied to a gate of the TFT so as to allow a predetermined specified current to flow between the drain and source of the TFT; and a measurement unit which measures the gate voltage adjusted by the gate voltage adjustment circuit.

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Yasu-gun, Japan

Kenichi Imura