Seiko Epson Corporation

Kenichi Hano

Kunihito Yamanaka

Keigo Iizawa

Takuya Owaki

A surface acoustic wave resonator includes a quartz substrate with preselected Euler angles and an IDT on the quartz substrate. The IDT includes electrode fingers and excites a stop band upper end mode surface acoustic wave. Inter-electrode finger grooves are provided between the electrode fingers. Assuming a surface acoustic wave wavelength is &#x3bb;, an electrode finger film thickness is H, an inter-electrode finger groove depth is G, a line occupation rate of convex portions of the substrate between the inter-electrode finger grooves is &#x3b7;g, and a line occupation rate of the electrode fingers on the convex portions is &#x3b7;e, 0.0407&#x3bb;&#x2266;G+H; and &#x3b7;g&#x3e;&#x3b7;e.

Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic apparatus

A surface acoustic wave resonator includes a quartz crystal substrate with Euler angles (&#x2212;1.5&#xb0;&#x2266;&#x3c6;&#x2266;1.5&#xb0;, 117&#xb0;&#x2266;&#x3b8;&#x2266;142&#xb0;, and 42.79&#xb0;&#x2266;|&#x3a8;|&#x2266;49.57&#xb0;), and an IDT provided on the quartz crystal substrate that includes a plurality of electrode fingers and excites a stop band upper end mode surface acoustic wave. Inter-electrode finger grooves are provided between the electrode fingers. If a line occupation rate of the convex portions of the quartz crystal substrate disposed between the inter-electrode finger grooves is &#x3b7;g, and a line occupation rate of the electrode fingers disposed on the convex portions is &#x3b7;e, &#x3b7;&#x3e;&#x3b7;and 0.59&#x3c;&#x3b7;&#x3c;0.73 are satisfied when an effective line occupation rate &#x3b7;eff of the IDT is an arithmetic mean of the line occupation rate &#x3b7;g and the line occupation rate &#x3b7;e.

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Minamisoma, Japan

Kenichi Hano