Omron Corporation

Kenichi Handa

Hideyuki Nakao

Shinya Nakagawa

Takashi Kasai

Katsuyuki Yamamoto

Ryuhei Goto

Hajime Kano

Susumu Kamiyama

It is possible to reduce a decrease in accuracy of measuring the concentration of a measurement target gas even in a case where, in a mixture of gases, there is a gas greatly different from another gas in a rate of change in thermal conductivity with respect to temperature. The concentration measurement device includes a sensor configured to measure the concentration of a measurement target gas in a mixture of gases on the basis of thermal conductivity of the measurement target gas, the mixture of gases including two or more components, and a heating unit configured to heat the mixture of gases so that the concentration of the measurement target gas can be uniquely determined with respect to the thermal conductivity.

Concentration measurement device

A first heat generator heats a mixture of fluids to a first temperature. A predetermined thermal property value of the mixture set to the first temperature is obtained, the first heat generator heats the mixture to a second temperature, the thermal property value of the mixture set to the second temperature is obtained. First relationship information between the thermal property value of the mixture set to the first temperature and a mixture ratio of a first fluid is obtained. Second relationship information between the thermal property value of the mixture set to the second temperature and the mixture ratio of the first fluid is obtained. Mixture ratios are calculated based on the thermal property value of the mixture set to the first temperature, the thermal property value of the mixture of fluids set to the second temperature, the first relationship information, and the second relationship information.

Mixture ratio calculation device

A flow measurement device includes a flow sensor that senses a flow rate of a measurement target fluid flowing through a main channel, a characteristic-value obtaining unit that includes a heater heating the target fluid and a temperature sensor sensing a temperature of the target fluid, and obtains a characteristic value of the target fluid, and a flow rate correction unit that corrects a flow rate of the target fluid calculated based on a sensing signal from the flow sensor using the characteristic value of the target fluid obtained by the characteristic-value obtaining unit. The heater and the temperature sensor are arranged parallel to each other in a direction orthogonal to a flow direction of the target fluid. The characteristic-value obtaining unit obtains the characteristic value based on a difference between the temperatures of the target fluid sensed by the temperature sensor before and after the heater temperature is changed.

Flow measurement device, flow measurement method, and flow measurement program

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Takatsuki, Japan

Kenichi Handa