Ckd Corporation

Kabushiki Kaisha Toshiba

Fujikin Inc.

Tokyo Electron Limited

Kenichi Goshima

Yoshihisa Sudo

Katsuya Okumura

Michio Yamaji

Kazuhiro Yoshikawa

Tsuneyuki Okabe

Hiroshi Itafuji

Yuji Kawano

George Hoshi

Akinori Nagaya

Hideo Kobayashi

Akihiro Kojima

Shigenobu Nishida

Railscorresponding to lines A, B, C are provided in parallel on a bass plate, and coupling membersare slidably mounted on each of the rails. Each of fluid controllersis mounted generally on two of these coupling members

Fluid control device

Each of lines A, B is provided on each of opposite sides thereof with a tape heater, and a space for positioning a tape heater holding cliptherein is provided in each of locations between adjacent fluid control devices. The tape heatersare held from opposite sides thereof to the line by the clip. The lines A, B provided with the heaters are each mounted on a line support memberremovably attached to a base member. The line support memberhas a heater insertion boreformed therein and extending longitudinally thereof. A sheath heateris inserted into the bore

Fluid controller

A purge system has a purge gas piping system for substituting inert gas for process gas when a device connected in a process gas piping system is detached therefrom. In the purge system, a purge joint for connecting two pipes in the purge gas piping system is provided with an opening formed in alignment with the position where the two pipes are connected in the purge joint.

Purge system and purge joint

In a weldless joint 13, screwing a fastening member 13 into a joint body allows two pipes to move closer to each other in an axial direction without rotating. The two pipes can be thus connected without welded. Packings and disposed in the joint body prevent the leakage of gas through the contact surfaces of the pipes and, further, the leakage of gas from the inside of the joint body to the outside thereof. Accordingly, no packing or sealing element is needed on the periphery of the fastening member.

Weldless joint

A fluid coupling provides a cap nut having an internal screw formed inside, a pipe having a mirror-finished surface formed at an end face and a groove in an outer periphery, a device for preventing rotation of the pipe together with the cap nut, in contact with the inner end face of the cap nut, a ferrule fitted in the groove formed in the outer periphery of the pipe, in contact with the device for preventing the rotation of the pipe together with the cap nut, the ferrule which transmits to the pipe a thrust of the cap nut in the pipe's longitudinal direction, a gasket fitted on an end part of the pipe, with the end face of the pipe in contact with the gasket through the entire circumference, and a body mirror-finished at the end face and provided with an external screw formed on the outer periphery, wherein the end face of the body is in contact with one side of the gasket the other side of which is in contact with the pipe, and the external screw of the body and the internal screw of the cap nut is tightened to a specific torque.

Fluid coupling

A gas supplying system for supplying a corrosive gas or the like to a semiconductor manufacturing apparatus or the like. A plurality of kinds of component gases are introduced into a chamber and mixed therein to form a desired supply gas. After supplying the desired supply gas, the chamber is evacuated and an inert gas is charged into the chamber to substitute a residual supply gas remaining in the chamber by the inert gas. The evacuation of the chamber and the charging of the inert gas into the chamber are repeated two or more times. Accordingly, the residual supply gas can be efficiently removed from the chamber and substituted by the inert gas.

Growing community of inventors

Kasugai, Japan

Kenichi Goshima