Asm Technology Singapore Pte Ltd

Keng Hock Chew

Teng Hock Kuah

Shu Chuen Ho

See Yap Ong

A method of detaching a film of material ( ) from the surface ( ) of a substrate ( ). An outlet ( ) of a fluid delivery device ( ) is engaged with an aperture ( ) in the substrate ( ) from the opposite side of the substrate ( ) from the surface ( ) to which the film ( ) is attached. Fluid is passed out of the outlet ( ) and through the aperture ( ) to generate a detaching force between the film of material ( ) and the surface ( ) adjacent to the aperture ( ).

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Keng Hock Chew