Novellus Systems Incorporated

Ken Reynolds

Paul Franzen

Peter S Thaulad

Rich Blank

Wayne Tang

Kevin Bertsch

A work piece handling apparatus moves workpieces with a plurality of independently movable load cups that have combined multiple axes of motion. The apparatus can load and unload work pieces from a wet process station and move work pieces between wet process stations and maintain wet chemistry delivery to the workpiece without involving a robot. A method of work piece handling using the apparatus provides a significant throughput improvement by reducing the inherent time lag of pneumatic systems and eliminating multiple steps involving the robot during inter-station wafer transfer.

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San Jose, CA, United States of America

Ken Reynolds