Canon Kabushiki Kaisha

Tokyo Institute of Technology

Ken Nishida

Kenichi Takeda

Tetsuro Fukui

Hiroshi Funakubo

Katsumi Aoki

Takanori Matsuda

Toshihiro Ifuku

Shintaro Yokoyama

Shintaro Yasui

Takashi Katoda

The present invention provides a piezoelectric element and having a piezoelectric body and a pair of electrodes being contact with the piezoelectric body, wherein the piezoelectric body consists of an ABOperovskite oxide in which an A-site atom consists of Bi and a B-site atom is composed of an atom of at least two types of elements.

Piezoelectric body and liquid discharge head

An optical element satisfactory in transparency and characteristics as an optical modulation element, and a piezoelectric substance element satisfactory in precision and reproducibility as a fine element such as MEMS can be provided. The piezoelectric substance element includes, on a substrate, at least a first electrode, a piezoelectric substance film and a second electrode. The piezoelectric substance film does not contain a layer-structured boundary plane; the crystal phase constituting the piezoelectric substance film comprises at least two of a tetragonal, a rhombohedral, a pseudocubic, an orthorhombic and a monoclinic; and the piezoelectric substance film includes, in a portion in which a change in the composition is within a range of &#xb1;2%, a portion where a proportion of the different crystal phases changes gradually in a thickness direction of the film.

Piezoelectric substance element, liquid discharge head utilizing the same and optical element

Growing community of inventors

Yokosuka, Japan

Ken Nishida