Mitutoyo Corporation

Ken Motohashi

Johannes Anna Quaedackers

Hiroshi Sakai

Sadayuki Matsumiya

Tatsuya Nagahama

Hidemitsu Asano

Masanori Arai

Shuichi Kamiyama

Atsushi Usami

Hiromu Maie

Han Haitjema

Adriaan Tiemen Zuiderweg

Yoshihiko Takahashi

Tetsuya Ito

An interferometric optical device that measures the curved wall shape of a cylindrical object and includes: an interferometric optical system that emits measurement light at the curved wall of the object, collects the light reflected by the object, and creates a composite wave that combines the reflected light and a reference light; a rotation drive assembly that is connected to the interferometric optical system and rotationally displaces the interferometric optical system centered about a rotation axis that coincides with a center axis of the cylindrical shape of the object; a sensor that acquires a two-dimensional distribution of the intensity of the composite wave using a plurality of photoreceptor elements arrayed two-dimensionally; and a computation device that computes the internal wall shape of the object based on the plurality of two-dimensional distributions acquired in a state where a rotation angle for the rotation drive mechanism varies.

Optical interference measuring device

A surface texture measuring apparatus includes an X axis displacement mechanism and a Y axis displacement mechanism displacing a measurable object having an interior wall along an XY plane; a measurement sensor measuring a surface texture of the interior wall without contact; a Z axis displacement mechanism displacing the measurement sensor in a Z axis direction orthogonal to the XY plane and bringing the measurement sensor to face the interior wall; a W axis displacement mechanism displacing the measurement sensor facing the interior wall in a normal direction of the interior wall; and a &#x3b8; axis displacement mechanism displacing the measurement sensor facing the interior wall along the interior wall.

Surface texture measuring apparatus

A surface texture measuring apparatus includes: a measurement sensor measuring, without contact, a surface texture of an interior wall of a cylinder portion of a measurable object while displacing in a normal direction of the interior wall at each measurement region into which the interior wall is divided in a circumferential direction of the cylinder portion; a W axis displacer displacing the measurement sensor in a W axis direction; a &#x3b8; axis displacer displacing the measurement sensor in the circumferential direction, after measurement of the surface texture of a first measurement region, such that the measurement sensor faces a second measurement region adjacent to the first measurement region in the circumferential direction; and a controller adjusting a W axis direction measurement position for measuring the surface texture of the second measurement region while displacing the measurement sensor in the W axis direction.

Surface texture measuring apparatus and method

The present invention provides an interference measuring device with an optical system that can receive light reflected from a measurement object of a surface profile that is not perpendicular to an optical axis. An interference measuring device includes a light source for emitting light and an interferometric objective lens. The interferometric objective lens includes a reference mirror disposed in a reference beam path and a beam splitter that splits the incident light into a beam traveling along the reference beam path and a beam traveling along a measurement beam path. The beam splitter also combines the beam reflected off the reference mirror with the beam reflected off a measurement object disposed in the measurement beam path before emitting the combined beams. The interference measuring device further includes an imaging unit for taking an image of the combined beams forming on the unit and an aperture stop disposed in an optical path linking the interferometric objective lens, the light source, and the imaging unit together. The aperture stop is movable along an optical axis of the interferometric objective lens.

Interference measuring device and method of measurement using the same device

An interference objective lens includes: an objective lens system; a beam splitter which is placed between a measurement surface of a measuring object and a tip end of the objective lens, which diverges light emitted from the objective lens into a reference optical path and a measurement optical path, and which outputs combined wave in which reflection light passing through the reference optical path and reflection light passing through the measuring object are combined; a reference mirror which is placed in the reference optical path and which reflects, by the beam splitter, light diverged into the reference optical path; a mirror holding member which has a spherical surface-shaped outer surface, and which holds the reference mirror such that a reflection surface of the reference mirror passes through a center of a spherical surface; a support member which has a spherical surface-shaped inner surface having a diameter which is substantially equal to the outer surface of the mirror holding member, and which supports the outer surface of the mirror holding member by the inner surface; and a reference mirror adjusting mechanism which adjusts a position of the mirror holding member in the support member.

Interference objective lens and light interference measuring device

An interference measuring device comprises: a light source; a beam splitter that causes the light to diverge into a reference optical path and a measurement optical path and that outputs a combined wave in which reflection light passed the reference optical path and reflection light passed the measurement optical path are combined; a reference light diverging part that causes the light diverged into the reference optical path, to further diverge into a plurality of optical paths and that causes reflection light beams respectively passed the optical paths to be input into the beam splitter; and a plurality of reference mirrors that are respectively arranged in the optical paths such that optical path lengths of the optical paths are different from each other, and that reflect reference light. An interference image is imaged by varying the optical path length of either the reference optical path or the measurement optical path.

Growing community of inventors

Eindhoven, Netherlands

Ken Motohashi