Tokyo Electron Limited

Murata Kikai Kabushiki Kaisha

Ken Miyano

Shuji Akiyama

Takashi Nakao

Takahiko Murayama

In an automated guided vehicle including a transfer equipment which transfers a wafer, a buffer cassette which temporarily stores the wafer, and a pressing member which is provided at an opening of the buffer cassette, when traveling the automated guided vehicle, if the pressing member is slid to a center position from an end position of the opening of the buffer cassette to contact and press against the edge of the wafer, the pressing member was easily damaged by being rubbed against a periphery of the wafer, and there was a problem in durability of the pressing member. The pressing membercan transfer between a 'pressing' position which contacts against the edge of the waferto press the wafer, and a 'receding' position which is located away from the edge of the wafer. A transferring direction A of the pressing memberof a moment in which the pressing membercontacts against the edge of the waferwhen the pressing membertransfers from the &#x201c;receding&#x201d; position to the &#x201c;pressing&#x201d; position, is approximately perpendicular to an outline of the part of the wafercontacted against the pressing member

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Kameoka, Japan

Ken Miyano