Toto Ltd.

Ulvac, Inc.

Ken Maehara

Tetsuo Kitabayashi

Koh Fuwa

Noriaki Tateno

Hiroaki Hori

Takeshi Uchimura

An electrostatic chuck for attracting an insulative substrate to be processed, the electrostatic chuck comprising a dielectric layer having a first surface which attracts an insulative substrate, and a second surface on which are provided a plurality of electrodes, and an insulative support base plate fixing said dielectric layer. A distance between adjacent ones of the electrodes and the thickness of the dielectric layer are adjusted such that when a potential difference is established between the electrodes, a non-uniform electric field is formed in which the insulative substrate is partially polarized and attracted to the first surface by gradient force.

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Kanagawa, Japan

Ken Maehara