Kabushiki Kaisha Yaskawa Denki

Ken-ichi Motonaga

Kazunori Hino

Hiroki Sanemasa

Kazunari Shiraishi

Hitoshi Wakizako

Yukito Sagasaki

A transfer robot () for thin substrate capable of efficiently detecting the stored state of thin substrates and an inspection method for thin substrate capable of accurately detecting the stored state of thin substrates; the robot (), comprising an inspection camera () for detecting the stored state of the thin substrates () in a storage cassette (), wherein the plurality of thin substrates () stored in the storage cassette () are carried out from the storage cassette () by the robot.

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Fukuoka, Japan

Ken-ichi Motonaga