Brewer Science, Inc.

Other

Ken-Ichi Mizusawa

Rama Puligadda

Tomoyuki Enomoto

Shin-Ya Arase

Satoshi Takei

Yasuhisa Sone

Anti-reflective coatings formed from new polymers and having high etch rates are provided. Broadly, the coatings are formed from a polymer binder and a light attenuating compound. The polymer binder has halogen atoms bonded thereto, preferably to functional groups on the polymer binder rather than to the polymer backbone. Preferred polymer binders comprise acrylic polymers while it is preferred that the halogenated functional groups of the polymer binders be dihalogenated, and more preferably trihalogenated, with chlorine, fluorine, or bromine atoms.

Halogenated anti-reflective coatings

Thermosetting anti-reflective coatings for full-fill dual damascene process

Growing community of inventors

Narashino, Japan

Ken-Ichi Mizusawa