Nlight, Incorporated

Ken Gross

Dahv A V Kliner

Robert J Martinsen

Roger L Farrow

Jay Small

Scott R Karlsen

Brian Victor

Vito P Errico

Adam Dittli

David Martin Hemenway

Aaron W Brown

Shuang Li

A method of processing by controlling one or more beam characteristics of an optical beam may include: launching the optical beam into a first length of fiber having a first refractive-index profile (RIP); coupling the optical beam from the first length of fiber into a second length of fiber having a second RIP and one or more confinement regions; modifying the one or more beam characteristics of the optical beam in the first length of fiber, in the second length of fiber, or in the first and second lengths of fiber; confining the modified one or more beam characteristics of the optical beam within the one or more confinement regions of the second length of fiber; and/or generating an output beam, having the modified one or more beam characteristics of the optical beam, from the second length of fiber. The first RIP may differ from the second RIP.

Methods of and systems for processing using adjustable beam characteristics

Disclosed herein are laser scanning systems and methods of their use. In some embodiments, laser scanning systems can be used to ablatively or non-ablatively scan a surface of a material. Some embodiments include methods of scanning a multi-layer structure. Some embodiments include translating a focus-adjust optical system so as to vary laser beam diameter. Some embodiments make use of a 20-bit laser scanning system.

Optimization of high resolution digitally encoded laser scanners for fine feature marking

Some embodiments may include a method assessing whether a dynamic focus module in a three axis galvanometric scanning system (three-axis GSS) is associated with a focus calibration error. The method may include identifying a reference layer associated with a surface of the work piece and positive and negative offset distances each a difference distance above or below the reference layer, respectively, and selecting a target pattern based on the offset distances, wherein the pattern includes an individual line for each offset distance. The method may include commanding the three-axis GSS to draw the target pattern on the work piece, and then assessing whether the dynamic focus module is associated with the focus calibration error by correlating laser marking artifacts on the work piece to ones of the individual lines of the selected pattern. Other embodiments may be disclosed and/or claimed.

Focus assessment in dynamically focused laser system

Some embodiments may include a method of generating assessment data in a system including a galvanometric scanning system (GSS) having a laser device to generate a laser beam and an X-Y scan head module to position the laser beam on a work piece. The method may include selecting a dimension based on a desired accuracy for validation (and/or a characteristic of an imaging system in embodiments that utilize an imaging system). The method may include commanding the GSS to draw a mark based on a polygon or ellipse of the selected dimension around a predetermined target point associated with the work piece to generate assessment data, and following operation of the GSS based on said commanding, validating a calibration of the GSS using the assessment data (or an image thereof in embodiments that utilize an imaging system). Other embodiments may be disclosed and/or claimed.

Calibration validation using geometric features in galvanometric scanning systems

Laser pulses from pulsed fiber lasers are directed to an amorphous silicon layer to produce a polysilicon layer comprising a disordered arrangement of crystalline regions by repeated melting and recrystallization. Laser pulse durations of about 0.5 to 5 ns at wavelength range between about 500 nm and 1000 nm, at repetition rates of 10 kHz to 10 MHz can be used. Line beam intensity uniformity can be improved by spectrally broadening the laser pulses by Raman scattering in a multimode fiber or by applying varying phase delays to different portions of a beam formed with the laser pulses to reduce beam coherence.

Short pulse fiber laser for LTPS crystallization

A method includes determining a set of pattern position errors between (i) a set of expected pattern positions of a calibration pattern on a laser target situated in a laser processing field of a laser system and produced based on a set of initial scan optic actuation corrections associated with a scan optic of the laser system and (ii) a set of measured pattern positions of the calibration pattern, determining a set of scan optic actuation rates based on the set of initial scan optic actuation corrections, and updating the set of initial scan optic actuation corrections based on the set of scan optic actuation rates and the set of pattern position errors so as to form a set of updated scan optic actuation corrections that is associated with a reduction of at least a portion of the set of pattern position errors.

Method of processing calibration data in 3D laser scanner systems

An optical beam delivery device. The device comprises a first length of fiber comprising a first RIP formed to enable the adjusting of one or more beam characteristics of an optical beam by a perturbation device. The optical beam delivery device further comprises a second length of fiber having a proximal end for receiving the optical beam from the first length of fiber and a distal end. The proximal end is coupled to the first length of fiber. The second length of fiber comprises a second RIP formed to confine at least a portion of the optical beam within one or more confinement regions. A beam modification structure is disposed at, or a distance from, the distal end of the second length of fiber. The beam modification structure is configured to modify at least one property of the optical beam chosen from beam divergence properties, beam spatial properties and beam directional characteristics.

Beam modification structures and methods of modifying optical beam characteristics using the beam modification structures

Disclosed herein are methods, apparatus, and systems for a multi-operation optical beam delivery device having a laser source to generate the optical beam. A beam characteristic conditioner that, in response to a control input indicating a change between the different laser process operations, controllably modifies the beam characteristics for a corresponding laser process operation of the different laser process operations. A delivery fiber has an input end coupled to the beam characteristic conditioner and an output end coupled to a process head for performing the corresponding laser process operation.

Multi-operation laser tooling for deposition and material processing operations

Disclosed herein are methods, apparatus, and systems for perturbing a laser beam propagating within a first length of fiber to adjust one or more beam characteristics of the laser beam in the first length of fiber or a second length of fiber or a combination thereof, coupling the perturbed laser beam into a second length of fiber and maintaining at least a portion of one or more adjusted beam characteristics within a second length of fiber having.

Method and system for cutting a material using a laser having adjustable beam characteristics

A method of tailoring beam characteristics of a laser beam during fabrication of an electronic device. The method includes: providing a substrate comprising one or more layers; adjusting one or more characteristics of a laser beam; and impinging the laser beam having the adjusted beam characteristics on the substrate to carry out at least one process step for fabricating the electronic device. The adjusting of the laser beam comprises: perturbing the laser beam propagating within a first length of fiber to adjust the one or more beam characteristics of the laser beam in the first length of fiber or a second length of fiber or a combination thereof, the second length of fiber having two or more confinement regions; coupling the perturbed laser beam into the second length of fiber; and emitting the laser beam having the adjusted beam characteristics from the second length of fiber.

Multi-function semiconductor and electronics processing

A processing system directs a laser beam to a composite including a substrate, a conductive layer, and a conductive border. The location of a focus of the laser beam can be controlled to bring the laser beam into focus on the surfaces of the conductive materials. The laser beam can be used to ablatively process the conductive border and non-ablatively process the conductive layer by translating a focus-adjust optical system so as to vary laser beam diameter.

Growing community of inventors

Vancouver, WA, United States of America

Ken Gross