Analog Devices,inc.

Kemiao Jia

Xin Zhang

Michael W Judy

Jinbo Kuang

Jeffrey A Gregory

Tyler Adam Dunn

Igor P Prikhodko

Eugene Oh Hwang

Charles Blackmer

George M Molnar

Laura Cornelia Popa

Erdinc Tatar

Christopher Needham

Jianglong Zhang

Bradley C Kaanta

A microelectromechanical systems (MEMS) accelerometer is provided, comprising a substrate disposed in a plane defined by a first axis and a second axis perpendicular to the first axis; a first proof mass and a second proof mass coupled to the substrate and configured to translate in opposite directions of each other along a third axis perpendicular to the first and second axes; and at least one lever coupling the first proof mass to the second proof mass, wherein, the MEMS accelerometer is configured to detect acceleration along the third axis via detection of translation of the first and second proof masses along the third axis; and the MEMS accelerometer exhibits symmetry about the first and second axes.

Accelerometer with translational motion of masses

Columnar multi-axis microelectromechanical systems (MEMS) devices (such as gyroscopes) balanced against undesired linear and angular vibration are described herein. In some embodiments, the columnar MEMS device may comprise at least two multiple-mass columns, each having at least three proof masses and being configured to sense rotation about a respective axis. The motion and mass of the proof masses may be controlled to achieve linear and rotational balancing of the MEMS device. The columnar MEMS device may further comprise one or more modular drive structures disposed alongside each multiple-mass column to facilitate displacement of the proof masses of a respective column. The MEMS devices described herein may be used to sense roll, yaw, and pitch angular rates.

3-axis gyroscope with rotational vibration rejection

This disclosure describes techniques for operating a lidar device. The techniques include emitting light resulting in a plurality of non-parallel laser beam waves; directing the plurality of non-parallel laser beam waves towards a laser beam scanner; reflecting the non-parallel plurality of beam waves by the laser beam scanner towards a collimator device; collimating, with the collimator device, the plurality of non-parallel laser beam waves reflected by the laser beam scanner into a corresponding plurality of parallel plane waves; and directing the plurality of plane waves from the collimator device towards a field of interest.

Laser beam control in a LIDAR system

A MEMS product includes a stress-isolated MEMS platform surrounded by a stress-relief gap and suspended from a substrate. The stress-relief gap provides a barrier against the transmission of mechanical stress from the substrate to the platform.

Stress isolation platform for MEMS devices

A two-axis microelectromechanical systems (MEMS) gyroscope having four proof masses disposed in respective quadrants of a plane is described. The quad proof mass gyroscope may comprise an inner coupler passing between a first and a third proof mass and between a second and a fourth proof mass, and coupling the four proof masses with one another. The quad proof mass gyroscope may further comprising a first outer coupler coupling the first and the second proof masses and a second outer coupler coupling the third and the fourth proof masses. The outer couplers may have masses configured to balance the center of masses of the four proof masses, and may have elastic constants matching the elastic constant of the inner coupler. The quad gyroscope may further comprise a plurality of sense capacitors configured to sense angular rates.

Quad proof mass MEMS gyroscope with outer couplers and related methods

A MEMS device has a substrate with a structure surface and an opposing exterior surface, microstructure formed on the structure surface of the substrate, and a cap coupled with the substrate to form a hermetically sealed interior chamber containing the microstructure. The substrate forms a trench extending from, and being open to, the opposing exterior surface to produce a sensor region and a second region. Specifically, the second region is radially outward of the sensor region. The MEMS device also has a spring integrally formed at least in part within the trench to mechanically connect the sensor region and the second region, and other structure integral with the substrate. The spring or the other structure at least in part hermetically seal the interior chamber.

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Tolland, CT, United States of America

Kemiao Jia