Kla Corporation

Kelly Mauser

Yung-Ho Alex Chuang

John Fielden

Xuefeng Liu

Yinying Xiao-Li

Baigang Zhang

Elena Loginova

A nonlinear crystal including stacked strontium tetraborate SrBO(SBO) crystal plates that are cooperatively configured to create a periodic structure for quasi-phase-matching (QPM) is used in the final frequency doubling stage of a laser assembly to generate laser output light having a wavelength in the range of about 180 nm to 200 nm. One or more fundamental laser beams are frequency doubled, down-converted and/or summed using one or more frequency conversion stages to generate an intermediate frequency light with a corresponding wavelength in the range of about 360 nm to 400 nm, and then the final frequency converting stage utilizes the nonlinear crystal to double the frequency of the intermediate frequency light to generate the desired laser output light at high power. Methods, inspection systems, lithography systems and cutting systems incorporating the laser assembly are also described.

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Santa Clara, CA, United States of America

Kelly Mauser