Kla Corporation

Kelly Ann Weekley Mauser

Yung-Ho Alex Chuang

John Fielden

Xuefeng Liu

Yinying Xiao-Li

Baigang Zhang

Elena Loginova

A nonlinear crystal grating assembly including two integral nonlinear crystal grating structures having inverted crystal axes and having parallel spaced-apart mesas with predetermined mesa widths arranged such that, when assembled in an interdigitated configuration, the mesas of the two grating structures form an alternating grating pattern that is aligned with a propagation direction of input light, thereby creating a periodic structure for quasi-phase-matching (QPM). The nonlinear crystal grating structures are formed using strontium tetraborate, lithium triborate or another nonlinear crystal material. The nonlinear crystal grating assembly is utilized in a laser assembly in which fundamental wavelengths are doubled and/or summed using intermediate frequency conversion stages, and then a final frequency converting stage utilizes the nonlinear crystal grating assembly to double or sum one or more intermediate light beam frequencies to generate laser output light at high power and photon energy levels. A method and inspection system are also described.

United states frequency conversion using interdigitated nonlinear crystal gratings

Frequency conversion using interdigitated nonlinear crystal gratings

Growing community of inventors

Santa Clara, CA, United States of America

Kelly Ann Weekley Mauser