Hitachi Metals, Ltd.

Keizou Katou

Hiroyuki Hoshiya

Kenichi Meguro

Yasunori Abe

A magnetic sensor includes a plurality of magneto-resistive effect elements each configured by using a magneto-resistive effect film formed by laminating a pinned layer, a nonmagnetic layer, and a free layer in order from a side of a substrate. A first linear pattern is formed in a first portion on the substrate in a first direction. A second linear pattern is formed in a second portion on the substrate in a second direction. A magnetization direction of the first portion is different from a magnetization direction of the second portion. The magneto-resistive effect film is further formed on the substrate. Each of the plurality of magneto-resistive effect elements includes a pair of electrodes formed by the magneto-resistive effect film processed into a predetermined shape.

Method for producing magneto-resistive effect element, magnetic sensor, rotation-angle detection device

To provide a method which can define the direction and orientation of magnetization of a pinned layer while reducing the number of steps of forming a GMR film. The magnetization direction of the pinned layer is defined in a plurality of directions by forming a plurality of patterns having directivities. Further, when the magneto-resistive effect film is formed, a magnetic field is applied in a direction at an angle set between the angles of the plurality of patterns.

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Tokyo, Japan

Keizou Katou