Kabushiki Kaisha Kobe Seiko Sho

Japan Lsi Co., Ltd.

Keizo Tokushige

Koji Inoue

Shigeto Adachi

Norio Suzuki

Yutaka Kawata

Hirofumi Fukuyama

Kiyotaka Ishibashi

Akira Kobayashi

Akio Arai

Yukito Furukawa

Ken-ichi Inoue

Kaneo Yamada

Osamu Morioka

Akeo Kimura

Takahiro Nihei

Sunao Takahashi

Makoto Kimura

A converged ion beam apparatus wherein a very small beam spot can be formed with a high energy ion beam after passing a reduced route in which a type of the ion beam is classified. The device is incorporated in an apparatus wherein an ion beam from an accelerator is introduced in a spot to a specimen by way of an ion type classifying device, an objective collimator and a beam collector to perform reforming of a surface or an analysis of physical properties and/or composition or the like of a small area of the specimen. The objective collimator is disposed just on the downstream of the accelerator, and an analyzing component for analyzing an ion type and energy of a beam is interposed in a drift space in an object distance between the objective collimator and a quadruple pole magnetic lens. Several components of the apparatus are also improved including the quadruple pole magnetic lens, an objective slit device and a specimen chamber.

Converged ion beam apparatus

An apparatus for testing IC devices for performance at a low temperature comprises a cooling disk disposed within a test chamber and adapted to be cooled with liquid nitrogen of like refrigerant for cooling the IC device in contact or proximity therewith. A cooling bag for use as cooling means in testing IC devices at a low temperature comprises a bag adapted to intimately contact the IC device and having a refrigerant enclosed therein. Another apparatus for testing IC devices at a low temperature comprises a cooling bag reeved around a drive roller and an idler roller in the form of a belt conveyor and adapted to come into intimate contact from above with IC devices being transported on a conveyor to cool the devices.

Apparatus for testing IC devices at low temperature and cooling bag for

Growing community of inventors

Matsubara, Japan

Keizo Tokushige