Mori Seiki Co., Ltd.

Keizo Kashihara

Makoto Fujishima

Shizuo Nishikawa

Relative movement in X, Y and Z axis directions is made between a main spindle and a tablefor application in a machine tool in which a work is machined. An emitting elementfor irradiating laser beamand a photosensitive elementare disposed on the table. A measuring toolwith its top end being shaped as a cone form is attached to the main spindle. The laser beamis interrupted with the cone form portionof the measuring toolthrough relative movement between the tableand measuring toolbefore and after machining a work. Detection signal of interruption is generated at the moment of interruption, position is detected, operation processing is performed so that difference in X, Y and Z axes before and after machining is obtained along with values for correction. Positional coordinate values for three axis directions are detected simultaneously with a measuring device of a simple constitution by use of laser beam and values for correction such as of thermal displacement is obtained by operation processing of displacement values.

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Nara, Japan

Keizo Kashihara