Dcg Systems Gmbh

Fei Efa, Inc.

Nxp Usa, Inc.

Keith Serrels

James S Vickers

Derryck Telford Reid

Praveen Vedagarbha

Theodore R Lundquist

Kent Erington

Daniel Joseph Bodoh

Prasad Sabbineni

A pulsed-laser LADA system is provided, which utilizes temporal resolution to enhance spatial resolution. The system is capable of resolving CMOS pairs within the illumination spot using synchronization of laser pulses with the DUT clock. The system can be implemented using laser wavelength having photon energy above the silicon bandgap so as to perform single-photon LADA or wavelength having photon energy below the silicon bandgap so as to generate two-photon LADA. The timing of the laser pulses can be adjusted using two feedback loops tied to the clock signal of an ATE, or by adjusting the ATE's clock signal with reference to a fixed-pulse laser source.

Laser-assisted device alteration using synchronized laser pulses

Method to extract timing diagrams from synchronized single- or two-photon pulsed LADA by spatially positioning the incident laser beam on circuit feature of interest, temporally scanning the arrival time of the laser pulse with respect to the tester clock or the loop length trigger signal, then recording the magnitude and sign of the resulting fail rate signature per laser pulse arrival time. A Single-Photon Laser-Assisted Device Alteration apparatus applies picosecond laser pulses of wavelength having photon energy equal to or greater than the silicon band-gap. A Two-Photon Laser-Assisted Device Alteration apparatus applies femtosecond laser pulses of wavelength having photon energy equal to or greater than half the silicon band-gap at the area of interest. The laser pulses are synchronized with test vectors so that pass/fail ratios can be altered using either the single-photon or the two-photon absorption effect. A sequence of synthetic images with error data illustrates timing sensitive locations.

Synchronized pulsed LADA for the simultaneous acquisition of timing diagrams and laser-induced upsets

A system and method for obtaining super-resolution image of an object. An illumination beam is directed through an optical axis onto the object to be imaged. Paraxial rays of the illumination beam are deflected away from the optical axis and into a beam dump. The non-paraxial rays are collected after being reflected by the object so as to generate an image only from the non-paraxial rays.

Apparatus and method for annular optical power management

A method of obtaining two orthogonally polarized super-resolution images is provided. A first diffraction-limited image is obtained using horizontally polarized light; a second diffraction-limited image is obtained using vertically polarized light; and, the first and second images are processed so as to yield a convoluted image having super diffraction-limited performance in both dimensions. Enhanced alignment of CAD image to acquired image is facilitated using the horizontally and vertically polarized images.

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Fremont, CA, United States of America

Keith Serrels