Meta Platforms Technologies, LLC

Schott Ag

Keith Rozenburg

Martin Letz

Albrecht Seidl

Siddharth Buddhiraju

Ulrike Stöhr

Richard Farrell

Pasqual Rivera

Anneli Munkholm

Jilin Yang

Disclosed herein are techniques for waveguide displays. According to some embodiments, a method for fabricating a multi-layer optical device comprising includes measuring thickness variations within a target area of a first substrate for fabricating a first optical element of the multi-layer optical device and determining, based on the measuring, a thickness correction map indicating amounts of material to be removed in different regions of the target area to planarize the target area. The method also includes planarizing the target area of the first substrate based on the thickness correction map and bonding the first substrate to a second substrate that comprises a second optical element fabricated thereon to form a layer stack, wherein the target area of the first substrate aligns with and is bonded to the second optical element to form a multi-layer structure. The method further includes singulating the multi-layer structure from the layer stack.

Methods for correcting substrate thickness variation for waveguide applications

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Bellevue, WA, United States of America

Keith Rozenburg