Vacco Industries, Inc.

Keith D Dyer

Ben A Otsap

Joseph M Cardin

George R Hoppe

Antonio Gonzalez

A modular subsystem of a fluidic system is formed by assembling a set of chemically etched sheets of material. The modular subsystem includes mechanical, electrical, and fluidic components. A plurality of sheet members is provided. Respective ones of the sheet members are etched to form portions of mechanical, electrical, and fluidic components. A set of the sheet members are attached to each other to form a modular subsystem comprising the mechanical, electrical, and fluidic components. The resulting modular subsystem is assembled from a set of chemically etched sheets of material, and comprises a set of sheet members attached to each other. Each sheet member within the set is etched so that the mechanical, electrical, and fluidic components are formed when the sheet members are attached to each other.

Assembly of etched sheets forming a fluidic module

A flow control device (FCD) controls low flow rate fluid flow to within closely tolerated and consistently maintained limits by way of improved stacked disc technology. Stacking face to face of similar disc configurations generates novel enhanced etched disc stacks allowing course and fine flow adjustments, maintenance of cleanliness, resistance to flow degradation, improved structural strength and the ability to make real time flow adjustments during mission life. A stainless/copper sandwiched embodiment seals face to face leakage faster than known means for controlling etched disc face to face seal designs.

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Fountain Valley, CA, United States of America

Keith D Dyer