International Business Machines Corporation

Globalfoundries Inc.

Keith C Stevens

Kirk David Peterson

David Lewis Gardell

Grant W Wagner

Laura Louise Kosbar

Norman Whitelaw Robson

Dustin M Fregeau

Mark A DiRocco

Edward J Nowak

Jed Hickory Rankin

Mark B Ketchen

James M Crafts

Daniel J Poindexter

Kenneth A Lavallee

Karre M Greene

According to a method herein, a multi-level inductor is created around a through-silicon-via (TSV) in a semiconductor substrate. A voltage induced in the multi-level inductor by current flowing in the TSV is sensed, using a computerized device. The voltage is compared to a reference voltage, using the computerized device. An electrical signature of the TSV is determined based on the comparing the voltage to the reference voltage, using the computerized device.

Signal monitoring of through-wafer vias using a multi-layer inductor

System and method using low voltage current measurements to measure voltage network currents in an integrated circuit (IC). In one aspect, a low voltage current leakage test is applied voltage networks for the IC or microchip via one or more IC chip connectors. One or multiple specifications are developed based on chip's circuit delay wherein a chip is aborted or sorted into a lesser reliability sort depending whether the chip fails specification. Alternately, a low voltage current leakage test begins an integrated circuit test flow. Then there is run a high voltage stress, and a second low voltage current leakage test is thereafter added. Then, there is compared the second low voltage test to the first low V test, and if the measured current is less on second test, this is indicative of a defect present which may result in either a scrap or downgrade reliability of chip.

Low-voltage IC test for defect screening

Methodologies and test configurations are provided for testing thermal interface materials and, in particular, methodologies and test configurations are provided for testing thermal interface materials used for testing integrated circuits. A test methodology includes applying a thermal interface material on a device under test. The test methodology further includes monitoring the device under test with a plurality of temperature sensors. The test methodology further includes determining whether any of the plurality of temperature sensors increases above a steady state.

Methodologies and test configurations for testing thermal interface materials

A device with an optically controlled VT is disclosed. The device includes a semiconductor die which includes an FET, the FET having a gate on an upper surface of a substrate, a body under the gate and a source contacting the body forming a body-to-source junction. A light source is provided for exposing the body to light from the lower surface of the substrate.

Light controlled silicon on insulator device

A method of detecting defects in a semiconductor device by providing the semiconductor device with an electron-generating photodiode region to be used as a circuit stimulus in response to incident light, and also with conductive paths connecting the photodiode electron-generating region to terminals of polysilicon gate areas. The photodiode region of the semiconductor device is illuminated with light to stimulate the semiconductor device, and light emitted therefrom is detected. The semiconductor device can consist of a silicon chip, particularly a polysilicon gated field effect transistor silicon chip, wherein the photodiode electron-generating region possesses a diffused region therein.

Method for monitoring defects in polysilicon gates in semiconductor devices responsive to illumination by incident light

A method of substantially reducing charge build-up in a SOI device is provided. The method includes depositing a dielectric material on a surface of a semiconductor structure which includes at least silicon-on-insulator (SOI) devices therein. Next, a first conductive material is deposited on the dielectric material and then holes are drilled through the conductive material and the dielectric insulating material. Each hole is filled with a second conductive material, and thereafter selective portions of the first conductive material are removed to form contact pads for further probing. The method is especially useful in focused ion beam (FIB) drilling.

Reduction of induced charge in SOI devices during focused ion beam processing

A temperature control fixture for an integrated circuit under test which provides for heating or cooling of the back side of the integrated circuit while it is being tested by contacts and electrical leads applied to the opposite lead side thereof. A test housing defines a sealed test chamber within which a test mounting is provided for mounting the integrated circuit under test. The test mounting is connected to a plurality of test lines for conducting test signals between the lead side of the integrated circuit and a test instrument external to the test apparatus. The integrated circuit is mounted on the test mounting to expose the back side thereof to a flow of a heat transfer medium in the sealed test chamber to provide for cooling or heating thereof. An observation window in the test housing enables observation of the back side of device during testing.

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Fairfield, VT, United States of America

Keith C Stevens