Iatia Imaging Pty Ltd.

University of California

The University of Melbourne

Keith A Nugent

Brendan Edward Allman

Henry N Chapman

Anton Barty

David Paganin

The present invention relates to a method, apparatus, computer code and algorithm for determining the surface profile of an object. The invention involves capturing three or four images of the object at different planes of which some of the images can be taken outside the depth of field of the optical system and some inside the depth of the field of the optical system. The invention may have particular application in instances of surface analysis and security applications under ambient lighting conditions.

Method and apparatus for determining the surface profile of an object

Method and apparatus for producing an image containing depth information is provided. The method detects radiation emanating from a scene and forms at least two images of the scene at different planes. Each image contains a set of intensity data values. A variation of the data values is obtained so that two sets of intensity variances are obtained from the data values, and the intensity variance data is processed to obtain depth information. The depth information is coded so as to identify different depth information in the image data.

Method and apparatus for producing an image containing depth information

A method and apparatus for compensating for aberrations or distortions of an optical system such as an eye of a patient which is to be imaged by a camera is disclosed. Light passing through the optical system is detected by a charge coupled device () via an imaging system (). Phase data relating to the light passing through the system is determined and a processor () processes the data so that a transformation is determined which transforms the data relating to the wavefront of the light so that the phase data is transformed to remove aberrations or distortions introduced by the optical system. Thus, clearer images of the fundus of an eye generated by light passing through the optical system of the eye and for determining distortions or aberrations introduced by the optical system of the eye are provided.

Apparatus and method for correcting for aberrations in a lens system

A method and apparatus for quantitative determination of the phase of a radiation wave field is disclosed. A representative measure of the rate of change of intensity of the radiation wave field over a selected surface extending generally across the wave field is transformed to produce a first integral transform representation. A first filter is applied to the first integral transform representation corresponding to the inversion of a first differential operator reflected in the measure of rate of change of intensity to produce a first modified integral transform representation. An inverse of the first integral transform is applied to the first modified integral transform representation to produce an untransformed representation. The untransformed representation is corrected based on a measure of intensity over said selected surface and again transformed to produce a second integral transform representation. A second filter is applied to the second integral transform representation corresponding to the inversion of a second differential operator reflected in the corrected untransformed representation to produce a second modified integral transform representation. An inverse of the second integral transform is applied to the second modified integral transform representation to produce a measure of phase of the radiation wave field across the selected plane.

Phase determination of a radiation wave field

A method of quantitative determination of the phase of a radiation wave field including the steps of producing a representative measure of the rate of change of intensity of the radiation wave field over a selected surface extending generally across the wave field; producing a representative measure of intensity of the radiation wave filed over the selected surface; transforming the measure of rate of change of intensity to produce a first integral transform representation and applying to the first integral transform representation a first filter corresponding to the inversion of a first differential operator reflected in the measure of rate of change of intensity to produce a first modified integral transform representation; applying an inverse of the first integral transform to the first modified integral transform representation to produce an untransformed representation; applying a correction based on the measure of intensity over the selected surface to the untransformed representation; transforming the corrected untransformed representation to produce a second integral transform representation and applying to the second integral transform representation a second filter corresponding to the inversion of a second differential operator reflected in the corrected untransformed representation to produce a second modified integral transform representation; and applying an inverse of the second integral transform to the second modified integral transform representation to produce a measure of phase of the radiation wave field across the selected plane.

A condenser for use with a ring-field deep ultraviolet or extreme ultraviolet lithography system. A condenser includes a ripple-plate mirror which is illuminated by a collimated or converging beam at grazing incidence. The ripple plate comprises a flat or curved plate mirror into which is formed a series of channels along an axis of the mirror to produce a series of concave surfaces in an undulating pattern. Light incident along the channels of the mirror is reflected onto a series of cones. The distribution of slopes on the ripple plate leads to a distribution of angles of reflection of the incident beam. This distribution has the form of an arc, with the extremes of the arc given by the greatest slope in the ripple plate. An imaging mirror focuses this distribution to a ring-field arc at the mask plane.

Condenser for ring-field deep ultraviolet and extreme ultraviolet lithography

A condenser for use with a ring-field deep ultraviolet or extreme ultraviolet lithography system. A condenser includes a ripple-plate mirror which is illuminated by a collimated beam at grazing incidence. The ripple plate comprises a plate mirror into which is formed a series of channels along an axis of the mirror to produce a series of concave surfaces in an undulating pattern. Light incident along the channels of the mirror is reflected onto a series of cones. The distribution of slopes on the ripple plate leads to a distribution of angles of reflection of the incident beam. This distribution has the form of an arc, with the extremes of the arc given by the greatest slope in the ripple plate. An imaging mirror focuses this distribution to a ring-field arc at the mask plane.

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North Fitzroy, Australia

Keith A Nugent