Toshiba Memory Corporation

Keitarou Suzuki

Osamu Nagano

Kouta Kameishi

According to an embodiment, an inspection apparatus includes an irradiation mechanism, an imaging device, a movable mechanism, and a control processor. The irradiation mechanism irradiates an inspection target with light. The imaging device captures an image of the inspection target through a lens. The movable mechanism changes, with respect to an axis extending in an inspection direction for the inspection target, an angle between the lens and a horizontal plane or an angle between the imaging device and the horizontal plane such that a sample surface of the inspection target, a principal face of the lens, and an imaging face of the imaging device conform to the Scheimpflug principle. The control processor adjusts sensitivities in an image of the sample surface captured by the imaging device at different levels in the image depending on a position in a perpendicular direction to the inspection direction.

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Yokkaichi, Japan

Keitarou Suzuki