Edwards Japan Limited

Keita Mitsuhashi

Tooru Miwata

Yoshiyuki Sakaguchi

Toshiyuki Ooki

A vacuum pump includes a housing having an inlet port, a stator column provided upright inside the housing, a rotating body having a shape surrounding an outer periphery of the stator column, a support means for rotatably supporting the rotating body, and a driving means for driving the rotating body to rotate, wherein gas is sucked in from the inlet port by rotation of the rotating body, and the stator column is constituted of a cast material of aluminum alloy having a mechanical material property of an elongation of 5% or more.

Vacuum pump, stator column used therein, and method for manufacturing stator column

In a vacuum pump, a portion of a lower end portion of a rotating cylindrical body is cut in an axial direction thereof to form an imbalance correction portion (removal portion). Preferably, the removal portion is formed so as to minimize an axial width of the rotating cylindrical body and set a circumferential width of the rotating cylindrical body to a value of not less than a thickness (width in a radial direction) of the rotating cylindrical body. Additionally, a corner formed in the removal portion is formed to have a large. With this configuration, in the rotating cylindrical body, the removal portion is formed to have a shape in which a removal width (depth) in the axial direction of the rotating cylindrical body is small and a removal width in the circumferential direction thereof is large.

Vacuum pump, rotating portion included in vacuum pump, and imbalance correction method

A vacuum pump is provided, which suppresses occurrence of a gas product in an exhaust side outlet of a thread groove and maintains pump performance over a long period. The vacuum pump includes inflow suppressing walls formed by widening greater an exhaust side end portion of ridge portions, extended along a gas exhaust direction on an outer circumferential surface of an inner circumference side stator, forward in a rotor rotating direction than an intake side end portion, the inflow suppressing walls suppressing retention of gas in exhaust side outlets of thread grooves engraved among the ridge portions.

Growing community of inventors

Chiba, Japan

Keita Mitsuhashi