Fujikin Inc.

Keisuke Nakatsuji

Atsushi Hidaka

Takatoshi Nakatani

Nobukazu Ikeda

Yukio Minami

Keiji Hirao

Ichiro Tokuda

A vaporization supply apparatusincludes a preheating sectionfor preheating a liquid raw material L, a vaporization sectionprovided on top of the preheating sectionfor heating and vaporizing the preheated liquid raw material L sent from the preheating section, a flow rate control deviceprovided on top of the vaporization sectionfor controlling the flow rate of a gas G sent from the vaporization section, and heatersfor heating the preheating section, the vaporization sectionand the flow rate control device

Vaporized feed device

In order to appropriately control temperatures of fluid heating sections that are maintained at different temperatures, the fluid control device () comprises a plurality of fluid heating sections () connected to each other and each having a flow path or a fluid accommodating portion inside, heaters () configured to heat each of the plurality of fluid heating sections to different temperatures, and heat insulating members (') disposed between adjacent fluid heating sections.

Fluid control device

Growing community of inventors

Osaka, Japan

Keisuke Nakatsuji