Fujikin Inc.

Tokyo Electron Limited

Keisuke Ishibashi

Michio Yamaji

Tadayuki Yakushijin

Tsuyoshi Tanikawa

Yasumasa Yanagida

Tomohiro Nakata

Tsuneyuki Okabe

Akihiro Harada

Takashi Funakoshi

Yoshinori Shimomura

Ryousuke Dohi

Takeru Miura

Hidenori Kiso

Kuniyasu Sakashita

Taichi Kitano

Keigo Kobayashi

Katsutoshi Shoji

Hirokatsu Maeda

Shunji Obara

Hiroshi Fukuchi

Takayasu Nakahama

Yusei Horikawa

Hiroaki Kikuchi

Ryohei Fujimoto

Norifumi Suntou

Yasuhiro Yoshikane

Shinichiro Sasaki

Toshinori Ochiai

Souta Hachiman

Ryo Sugimura

Conversion fitting

Hybrid valve

To provide a valve that is easily assembled and has a low possibility of breakage of a coupled section even when the valve has to be downsized or subjected to a large load. A valve has a valve unit and a drive unit, is configured to include: a first recess that is a recess formed in either one of a second stem or a first stem and is formed with a groove at a predetermined position on an inner circumferential surface of the recess; a second recess formed in another one thereof; a stem pin accommodated in both of the recesses; an urging member that is accommodated in the first recess and urges the stem pin to the other side; a sidewall through-hole that penetrates a sidewall of the second recess horizontally; and a ball that enters the sidewall through-hole.

Valve

A valve device comprising: a flow passage block in which a flow passage is formed; a diaphragm configured to open and close the flow passage; an actuator configured to push down the diaphragm via a diaphragm holder; a tubular bonnet formed with an internal thread on an inner circumferential surface, the bonnet being configured to join the flow passage block and the actuator; a tubular adjusting screw threaded to the internal thread, the adjusting screw being configured to come into contact with the diaphragm holder to adjust a valve opening position of the diaphragm; and an annular lock nut configured to lock the adjusting screw by being screwed into the internal thread.

Valve device, fluid control device, and manufacturing method of valve device

A gasket includes a thick portion providing a first face seal and a thin portion providing a second face seal. A fluid coupling has an annular gasket housing recess that includes a wide portion for housing the thick portion of the gasket and a narrow portion for housing the thin portion of the gasket.

Gasket for fluid coupling, and fluid coupling

Provided is a small-sized controller capable of precisely controlling a flow rate of a high-pressure fluid. Between a working shaft of a drive device and a valve stem, a power transmission device is disposed to amplify a force acting on the working shaft and transmit the resultant force to the valve stem. A diaphragm as a valve element is made of metal and is deformable to: a state where a fluid passage is fully closed; a state where the fluid passage is fully open; or a state where the fluid passage is partially open. When the fluid passage is partially open, on the basis of the flow rate of a fluid flowing through fluid passages, the drive device finely adjusts the position of the working shaft such that the flow rate is constant.

Controller

A first on-off valve () and a second on-off valve () each are a two-port valve. A first passage block () is provided with a first on-off valve-corresponding inflow passage () and a first on-off valve-corresponding outflow passage (). A second passage block () is provided with a second on-off valve-corresponding inflow passage () and a second on-off valve-corresponding outflow passage (). The second on-off valve-corresponding outflow passage () is in communication with an upstream side portion of the first on-off valve-corresponding outflow passage () via a communicating passage () formed in the first passage block (). An orifice () is provided between the second on-off valve-corresponding outflow passage () and the communicating passage ().

Shutoff-opening device

Provided is a switching valve for use in an analyzer module for switching flow passages of fluids, in which the manufacturing cost is reduced and the life is increased. The valve element is provided with a lower contact portion that comes into close contact with a lower valve seat disposed at a valve body when a valve is closed, and with an upper contact portion that comes into close contact with an upper valve seat disposed at a counter plate when the valve is open. The counter plate has a first recess that is open downward and a second recess that is open toward the first recess and has a smaller horizontal cross-sectional area than that of the first recess, and the upper valve seat is press-fitted into the second recess.

Switching valve

A valve element significantly improved in rotation preventing performance of an abutting member formed of a synthetic resin by using a caulking structure and a high-temperature-oriented valve provided with such a valve element. A valve element includes: an abutting member formed of a synthetic resin and configured to close a path opening by coming into abutment with a path opening edge, and a holding member having a recessed portion into which the abutting member is fitted, in which the holding member is caulked and thus the abutting member is held by the holding member. The holding member is provided with a plurality of notches at a portion to be caulked.

Valve element and high-temperature-oriented valve

A valve element movement mechanism includes: a first valve stem having one end portion to which a first valve element to close and open an area between one of the large diameter portion and the small diameter portion is fixed; a second valve stem having one end portion to which a second valve element to close and open an area between the other of the large diameter portions and the small diameter portion is fixed; a first bellows having one end portion fixed to a first bellows flange and the other end portion fixed to the first valve element; a second bellows having one end portion fixed to a second bellows flange and the other end portion fixed to the second valve element; a frame disposed outside the main passage; and an actuator to move the frame in the directions in which valve elements are closed and opened.

Flow dividing valve

Wrench

Provided is a fluid controller which enables precise flow-rate adjustment while securing the durability. The fluid controller includes a stem vertical-movement-amount upper-limit-value setting meanswhich sets an upper limit value of a vertical movement amount of a stemassociated with opening and closing operations. The fluid controller further includes a stem vertical-movement-amount fine-adjustment meanswhich changes the vertical movement amount of the stemassociated with the opening and closing operations, within a range of not greater than the upper limit value.

Fluid controller

Provided is a fluid controller in which reduction of the accuracy caused by the loosening of a screw portion and reduction of the durability caused by torsional stress are prevented. A stem vertical-movement-amount adjustment meansis provided with: a handlewhich has a female screwon an inner periphery thereof and which is rotatably supported by a casing; a movable bodyin which a male screwis provided on an outer periphery thereof and is screwed into the inner periphery of the handle; and a guide meanswhich prevents rotation of the movable bodyrelative to the casingand which enables vertical movement of the movable body

Provided is a diaphragm valve whose durability is improved by proper caulking. On a bottom surfaceof a depressionof a body, an annular inner projectionhaving a relatively small diameter and an annular outer projectionhaving a relatively large diameter are provided. A seatis made of synthetic resin and is inserted between the inner projectionand the outer projection. Both projectionsare caulked, whereby the seatis prevented from coming off. The height of the inner projectionis less than that of the outer projection, and a corneron the outside of the inner projectionhas a curved surface.

Diaphragm valve

A vacuum valve is provided with opening pressure setting means that sets a set value of a fluid pressure in a primary side passage beyond which communication is opened and forcible opening means that forcibly opens communication regardless of the fluid pressure in the primary side passage. The opening pressure setting means includes a spring receiver fixed to a stem, a compression coil spring having a lower end supported by the spring receiver, and an adjustment screw, movable in the axial direction, that presses the upper end of the compression coil spring. The forcible opening means includes a piston inserted onto the stemunder the spring receiver so as to be movable upward and downward and piston driving means that moves the piston and the spring receiver upward integrally by moving the piston upward using compressed air.

Growing community of inventors

Osaka, Japan

Keisuke Ishibashi