Nec Lcd Technologies, Ltd.

Keiko Yamada

Akitoshi Maeda

Shinichi Nakata

Takasuke Hayase

Masami Yamashita

The method of fabricating a liquid crystal display device includes the steps of (a) fabricating a switching device on a substrate, (b) forming an interlayer insulating film on the substrate such that the switching device is covered with the interlayer insulating film, and (c) forming a transparent electrode on the interlayer insulating film, the transparent electrode being electrically connected to the switching device through the interlayer insulating film, the step (c) including (c1) depositing electrically conductive, transparent and amorphous material on the interlayer insulating film, (c2) patterning the material into the transparent electrode, and (c3) turning the transparent electrode into polysilicon by thermal annealing carried out after formation of an alignment film.

Method of fabricating liquid crystal display device

The method of fabricating a liquid crystal display device includes the steps of (a) fabricating a switching device on a substrate, (b) forming an interlayer insulating film on the substrate such that the switching device is covered with the interlayer insulating film, and (c) forming a transparent electrode on the interlayer insulating film, the transparent electrode being electrically connected to the switching device through the interlayer insulating film, the step (c) including (c) depositing electrically conductive, transparent and amorphous material on the interlayer insulating film, (c) patterning the material into the transparent electrode, and (c) turning the transparent electrode into polysilicon by thermal annealing carried out after formation of an alignment film.

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Izumi, Japan

Keiko Yamada