National Institute of Advanced Industrial Science and Technology

Murata Manufacturing Co., Ltd.

Denso Corporation

Keiko Nishikubo

Morito Akiyama

Keiichi Umeda

Toshimi Nagase

Atsushi Honda

Masaya Kodama

Tsuyoshi Sakaki

Kinya Sakanishi

Yoshio Adachi

Katsumi Kamegawa

Kazuhiko Kano

Akihiko Teshigahara

Masato Uehara

A piezoelectric thin film composed of aluminum nitride and which contains magnesium and 31 to 120 atomic percent of niobium relative to 100 atomic percent of the magnesium, and the total content of the magnesium and the niobium relative to the total sum of contents of the magnesium, the niobium and the aluminum nitride falls within the range of 10 to 67 atomic percent.

Piezoelectric thin film, manufacturing method therefor, and piezoelectric element

A germanium-containing aluminum nitride piezoelectric film and a method for manufacturing an aluminum nitride piezoelectric film in which a germanium-containing aluminum nitride piezoelectric film is grown on a substrate by sputtering.

Aluminum nitride piezoelectric thin film, piezoelectric material, piezoelectric component, and method for manufacturing aluminum nitride piezoelectric thin film

A piezoelectric thin film comprising aluminum nitride containing magnesium and hafnium, wherein a content of the hafnium based on 100 atomic % of the magnesium is 8 atomic % or more and less than 100 atomic %, and a total content of the magnesium and hafnium based on a sum of a content of the magnesium, hafnium, and aluminum is in a range of 47 atomic % or less.

Piezoelectric thin film and method for manufacturing the same, and piezoelectric element

A piezoelectric thin film is formed through sputtering and consists essentially of scandium aluminum nitride. The carbon atomic content is 2.5 at % or less. When producing the piezoelectric thin film, scandium and aluminum are sputtered simultaneously on a substrate from a scandium aluminum alloy target material having a carbon atomic content of 5 at % or less in an atmosphere where at least nitrogen gas exists. The sputtering may be conducted also by applying an ion beam on an opposing surface of the alloy target material at an oblique angle. Moreover, aluminum and scandium may be also sputtered simultaneously on the substrate from an Sc target material and an Al target material. As a result, a piezoelectric thin film which exhibits excellent piezoelectric properties and a method for the same can be provided.

Piezoelectric thin film and method for producing the same

A method for preparing a carbon microparticle from an organic raw material having lignin as a main constituent, wherein an aqueous solution with 5% total concentration of lignin and sodium hydroxide (the proportion in mass is 1:0.5) is spray-dried to prepare a complex microparticle. This complex microparticle is heat-processed under nitrogen atmosphere at 600&#xb0; C. for one hour and cooled. Thereafter, this is washed with water and further dried to prepare a hollow carbon microparticle such as those shown in FIG.(). The prepared carbon microparticle is light-weight and has an equivalent specific surface area to commercially available activated charcoal.

Carbon microparticle having lignin as raw material and preparation method therefor

Elastic and ultra-lightweight hollow carbon fine particles and a method for producing such hollow carbon fine particles are to be provided. In the method, fine droplets are formed from a mixed solution containing a water soluble organic substance and lithium carbonate; composite fine particles of the water soluble organic substance and the lithium carbonate are prepared by drying the fine droplets formed from the mixed solution; and the composite fine particles are decomposed at a temperature in a range of 500&#xb0; C. to 900&#xb0; C.

Growing community of inventors

Tosu, Japan

Keiko Nishikubo