Hitachi, Ltd.

Keijirou Sakai

Kohji Maki

Houng Joong Kim

Hisao Tadokoro

Hideki Shimane

Hitoshi Shibata

Takashi Kobayashi

Hiroshi Fujii

Kinya Nakatsu

Yasuo Morooka

Toshiaki Okuyama

Seiji Ishida

Masahiro Hiraga

Junji Kato

A drive apparatus overcomes the problems of ensuring accurate mounting of a plurality of armature coils relative to a plurality of magnetic pole position detectors, limitations concerning the location for mounting, and the extension of primary-side length. The drive apparatus comprises a primary side including an arrangement of a plurality of armatures each having a core made of a magnetic material with coil windings. It also comprises a secondary side including a permanent magnet movably supported relative to the armatures via a gap. A magnetic pole position detector is disposed between adjacent armatures.

Drive apparatus and XY table utilizing the same

Disclosed herewith a compact linear motor provided with a plurality of magnetic pole teeth and used to increase the thrust force by canceling a magnetic attractive force working between the primary member and the secondary member. The linear motor comprises a primary member and a secondary member. The primary member includes cores formed with a magnetic material and an electromagnetic coil wound on the cores while the secondary member supported so as to be capable of moving relatively with respect to the primary member with a gap therebetween. In the linear motor, the coil that is wound commonly on the cores is also disposed between adjacent magnetic pole teeth.

Linear motor, its controlling method, and XY table

PWM converter system

Growing community of inventors

Kanasago, Japan

Keijirou Sakai