Panasonic Intellectual Property Management Co., Ltd.

Keijiro Masunaga

Satoshi Suemasu

A liquid droplet measurement method and a liquid droplet measurement device with which the luminance contrast can be improved without making changes in, for example, the numerical aperture of a lens when the quantity of reflected light from the surface of the measurement target liquid droplet alone cannot provide a sufficient luminance contrast. A method and an apparatus for manufacturing a device are also provided. The liquid droplet measurement device includes: a measurement table having a surface with a recess and for holding a translucent sample substrate; an imaging section that applies light onto the sample substrate having formed thereon a liquid droplet, and measures quantities of reflected light from the sample substrate and the liquid droplet; and a measurement control unit that determines a volume or a surface shape of the liquid droplet using luminance information of the reflected light quantities measured by the imaging section.

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Osaka, Japan

Keijiro Masunaga