Samsung Electronics Co., Ltd.

Keiji Murata

Masato Kajinami

Shinji Ueyama

Yoshiaki Yukimori

Tatsuya Ishimoto

Fumitaka Moroishi

A fluid pressure actuator including a fluid pressure cylinder having a first position detector and a second position detector, a piston body having a piston head and a rod, the piston head mounted on the rod and slidably accommodated in the fluid pressure cylinder, the rod including a first scale and a second scale, the first scale facing the first position detector and the first position detector configured to detect a position in a sliding direction of the piston body, the second scale facing the second position detector and the second position detector configured to detect a position of the rod in a rotation direction of the piston body, and a controller configured to perform a first positioning control of a position of the rod in the sliding direction and a second positioning control of the rod in the rotation direction may be provided.

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Kanagawa, Japan

Keiji Murata