Hitachi, Ltd.

Keiji Miyauchi

Yoshimi Yamamoto

Masanori Tanabe

Yoshitaka Matsuoka

Masatoshi Tsuchiya

Michitaka Shimazoe

Mitsuo Ai

Hideyuki Nemoto

A pressure transducer comprising a silicon diaphragm on which a semiconductor strain gauge is formed and which has a diaphragm portion deformable in response to a pressure, an insulating support which is made of borosilicate glass having the silicon diaphragm rigidly mounted thereon and which is provided with a pressure introducing hole in its central part, a metallic support which is cylindrical, which is made of an iron-nickel alloy similar in the thermal expansion coefficient to the borosilicate glass and on which the glass insulating support is rigidly mounted, and a metallic housing within which the integrated structure consisting of the silicon diaphragm, the glass insulating support and the metallic support is arranged; the silicon diaphragm, the insulating support and the metallic support being joined by the anodic bonding, the metallic support being rigidly welded to the metallic housing at its lower end part.

Pressure sensitive apparatus

Growing community of inventors

Ibaraki, Japan

Keiji Miyauchi