Fujitsu Corporation

Shinko Electric Industries Co., Ltd.

Keiichi Masaki

Junichi Kasai

Michio Sono

Masanori Yoshimoto

Akihiro Kubota

Youichi Kazama

A method of production of a semiconductor module comprised of a semiconductor chip, external connection terminal pads for bonding with solder balls or other external connection terminals, wires electrically connecting the same, and a sealing resin layer sealing the semiconductor chip, external connection terminal pds, and wires, where surfaces of the external connection terminal pads are exposed at bottoms of recesses formed in the sealing resin layer, comprising sealing by a resin external connection terminal pads and soluble metal layers formed at surfaces of the metal substrate by electroplating to form a sealing resin layer at that one surface, then etching away the metal substrate and soluble metal layers to thereby form in the resin sealing layer recesses exposing the external connection terminal pads at their bottoms by a single etching process without requiring special etching stop control.

Method of production of semiconductor module with external connection terminal

A process for producing a semiconductor device having a package with a semiconductor element molded therein, and a plurality of leads, each constituted by an inner lead located inside the package and an outer lead located outside the package, the leads being arranged in a line at a predetermined pitch, and the semiconductor element being electrically connected to the inner lead of each of the leads, wherein each side edge of each of the outer leads is flat.

Semiconductor device and a process for making same having improved leads

Growing community of inventors

Nagano, Japan

Keiichi Masaki