Stanley Electric Co., Ltd

Tokyo University of Science Foundation

Keiichi Ikegami

Akio Ogawa

Koji Matsumoto

Takanori Aimono

Yuki Yamaguchi

Shinichi Uozumi

Masakazu Satsu

Keishi Nishio

Provided is a hydrogen concentration measuring device capable of measuring with high accuracy a hydrogen concentration over an extensive range by a simple configuration. The device includes: a sensor chip which detects the electric resistance of a sensing film; an optical measurement unit which detects the transmitted light intensity of the film; and a controller. The controller performs measurement processing such that a hydrogen concentration in the gas atmosphere is measured based on the detected electric resistance in a first measurement range and based on the detected transmitted light intensity in a second measurement range and is determined so as to reduce a difference between the hydrogen concentration based on the detected electric resistance and the hydrogen concentration based on the detected transmitted light intensity in the overlap of the first measurement range and the second measurement range.

Hydrogen concentration measuring device

In an optical deflector apparatus including a mirror, an inner frame, an outer frame, an inner piezoelectric actuator adapted to flex the mirror around an axis of the mirror, an outer piezoelectric actuator adapted to flex the mirror around the axis of the mirror, and a driver adapted to generate an offset drive voltage and a rocking drive voltage. The offset drive voltage is applied to a first piezoelectric actuator selected from the inner piezoelectric actuator and the outer piezoelectric actuator. The rocking drive voltage is applied to a second piezoelectric actuator different from the first piezoelectric actuator.

Optical deflector apparatus capable of increasing offset deflecting amount of mirror

An optical deflector includes a mirror structure having a symmetrical axis on a plane of the mirror structure, an outer frame surrounding the mirror structure, and at least one meander-type piezoelectric actuator coupled between the mirror structure and the outer frame and having a plurality of piezoelectric cantilevers in parallel with the symmetrical axis folded at folded portions. The mirror structure is divided into a first half portion and a second half portion along the symmetrical axis. The first half portion is close to a closest one of the folded portions, and the second half portion is far from the closest one of the folded portions. A mass of the second half portion is larger than a mass of the first half portion.

Optical deflector including meander-type piezoelectric actuators and ill-balanced mirror structure

In an optical deflector including a mirror, a rib formed at an outer circumference of the mirror, a support frame surrounding the mirror, at least one torsion bar arranged along an axis of the mirror and coupled between the support frame and the mirror, and a pair of actuators arranged between the support frame and the torsion bar, a recess opposing the torsion bar is formed within the rib.

Growing community of inventors

Hachioji, Japan

Keiichi Ikegami