Jsr Corporation

Honda Motor Co., Ltd.

Keiichi Bessho

Makoto Higami

Hisao Ono

Katsuhiro Ishikawa

A catalyst paste composition for making electrodes has a uniform dispersion condition of a carbon black supporting a hydrogen reduction catalyst and is excellent in storage stability. The catalyst paste composition comprises a carbon black supporting a hydrogen reduction catalyst, an electrolyte, a water-soluble sulfonated polymer and a solvent.

Catalyst paste composition for electrode

Provided are a cleaning agent for semiconductor parts, which can decrease a load on the environment and has a high cleaning effect on CMP (chemical mechanical polishing) abrasive particles, metallic impurities and other impurities left on the semiconductor parts such as semiconductor substrates after the CMP, comprising a (co)polymer having at least one kind of group selected from the group consisting of sulfonic acid (salt) groups and carboxylic acid (salt) groups, the cleaning agent further containing a phosphonic acid (salt) group-containing (co)polymer, a phosphonic acid compound or a surfactant as needed; and a method for cleaning semiconductor parts with the above cleaning agent.

Growing community of inventors

Tokyo, Japan

Keiichi Bessho