Nikon Corporation

Ntt Electronics Corporation

Nikon Corporation of Tokyo

Keiichi Akagawa

Tohru Ishizuya

Masahiro Shoda

Junji Suzuki

Yoshihiko Suzuki

Toshiaki Tamamura

Katsuhiko Kurumada

Masatoshi Kanaya

Tetsuya Tomofuji

Takeshi Yagi

Atsushi Komai

Hitoshi Nomura

Tadashi Narui

Noboru Amemiya

Shigendo Nishi

In the present invention, a charge transfer unit is arranged on a first-plane side of a thinly-formed semiconductor base. Charge accumulating units are arranged on a second-plane side, the opposite side. A depletion prevention layer is arranged closer to the second-plane side than the charge accumulating units. The depletion prevention layer prevents a depletion region around the charge accumulating units from reaching the second plane of the semiconductor base. The depletion prevention layer can suppress surface dark current going into the charge accumulating units. Meanwhile, an energy ray incident from the second-plane side pass through the depletion prevention layer to generate signal charges in the charge accumulating units (depletion regions). The charge accumulating units collect, on a pixel-by-pixel basis, the signal charges which are to be transported to the charge transfer unit under voltage control or the like, and then are read to exterior as image signals.

Image sensor

A movable plate is fastened to a substrate via flexure parts and can move upward and downward with respect to the substrate. The substrate serves as a fixed electrode. The movable plate has second electrode parts which generate an electrostatic force between these electrode parts and the substrate by virtue of a voltage that is applied across these electrode parts and the substrate and a current path which is disposed in a magnetic field, and which generates a Lorentz force when powered. A mirror advances into and withdraws from the optical path. When the movable plate moves from the lower position in which the electrostatic force is increased to the upper position, the control part controls the current so that the Lorentz force is generated in a downward orientation and gradually decreases while the movable plate moves from an intermediate position to the upper position.

Microactuator device and optical switching system using the same

A microactuator array includes a plurality of first terminals equal in number to a first number, a plurality of second terminals equal in number to a second number, and a plurality of microactuators equal in number to the product of the first number and the second number. Each microactuator comprises a fixed electrode and a movable electrode which is movable with respect to the fixed electrode by electrostatic force. Each first terminal is electrically connected to fixed electrodes of microactuators equal in number to the second number. Each second terminal is electrically connected to movable electrodes of microactuators equal in number to the first number. The first terminals are not connected to any of the second terminals.

Micro-actuator array, micro-actuator device, optical switch, array, and optical switch system

The light guide substratehas mirror receiving groovesand light guides. The light guides conduct light that is input into the input ports to selected output ports in accordance with the advance and retraction of the mirrorswith respect to the grooves. The actuator substratehas mirrorsand actuators which place the mirrorsin a state in which the mirrors are drawn in toward the substrate, or a state in which the mirrors protrude from the substrate. The light guide substrateand actuator substrateare aligned using alignment marks and joined with a spacerinterposed so that the mirrorsretract from the grooveswhen the mirrorsare drawn in toward the substrate, and so that the mirrorsadvance into the grooveswhen the mirrorsprotrude from the substrate. This alignment is performed in a state in which all of the mirrorsare drawn in toward the substrate

Light-beam switching/adjusting apparatus and manufacturing method thereof

A waveguide type optical device performs such monitoring as detection of a relative position of an insert plate to a groove. The waveguide type optical device comprises a groove disposed at an intersection position of a first optical waveguide and a second optical waveguide; an insert plate disposed to be insertable into the groove; means for applying a static magnetic field such that a vector product of a velocity vector (A) of the insert plate and its magnetic field vector (B) is nonzero; a cantilever that has electrical wiring including therein a wiring part lying in a direction perpendicular to both the velocity vector and the magnetic field vector and that supports the insert plate; and means for detecting a relative position of the insert plate to the groove by detecting a current induced in the electrical wiring.

Waveguide type optical device and position detecting method

The mirror device has a mirror, and a supporting mechanism which elastically supports the mirroron a substratein a state in which the mirror floats from the substrate, so that the mirror can be inclined in an arbitrary direction. The supporting mechanism has three supporting partsA,B andC that mechanically connect the substrateand mirror. Each of the supporting partsA,B andC has one or more plate spring partsthat are constructed from a thin film consisting of one or more layers. One end portion of each plate spring partis connected to the substratevia a leg partwhich has a rising part that rises from the substrate. The other end portion of the plate spring partis mechanically connected to the mirrorvia a connecting part which has a rising part that rises from this other end portion. The mirroris supported on the substrateonly via the plate spring partof the respectiveA,B andC. As a result, compactness and mass production characteristics can be greatly improved while maintaining superior optical characteristics.

Mirror device, optical switch, thin film elastic structure, and thin elastic structure producing method

The movable partis fastened to the substratevia flexure partsandand can move upward and downward with respect to the substrateThe substratealso serves as a fixed electrode. The movable parthas second electrode partsandwhich can generate an electrostatic force between these electrode parts and the substrateby means of a voltage that is applied across these electrode parts and the substrateand a current pathwhich is disposed in a magnetic field, and which generates a Lorentz force when a current is passed through this current path. A mirrorwhich advances into and withdraws from the light path is disposed on the movable partAs a result, the mobility range of the movable part can be broadened, and the power consumption can be reduced, without applying a high voltage or sacrificing small size.

Micro-actuator utilizing electrostatic and Lorentz forces, and micro-actuator device, optical switch and optical switch array using the same

Radiation detectors are disclosed that include at least one element (pixel). In a pixel, a desired positional relationship between two &ldquo;effecting&rdquo; elements is maintained regardless of changes in temperature or other prevailing variable. The detectors can be &ldquo;electrical capacitance&rdquo; or &ldquo;optical-readout&rdquo; types. A pixel of the electrical capacitance type includes two electrodes (reference electrode and response electrode) that face each other and have a set gap therebetween. The electrodes are attached to respective displaceable members (configured as thermal bimorphs) having identical structures. A pixel of the optical readout type includes a half-mirror and a reflector that face each other and have a set gap therebetween. The half-mirror and reflector are attached to respective displaceable members. Radiation is absorbed by a radiation absorber that transfers the heat to certain displaceable members that bend to tilt accordingly. Other displaceable members are not heated and do not bend. The displaceable members are formable simultaneously during respective fabrication steps.

Radiation-detection devices

The present invention concerns an image-pickup apparatus and a method for driving the same, adapted for reading signal charges accumulated in a plurality of photodetection portions provided on a predetermined plane through vertical transfer lines and a horizontal transfer line. The image-pickup apparatus has the structure for establishing potential wells having a length not smaller than a vertical width of a horizontal line, in the vertical transfer lines, thereby permitting the horizontal width of the vertical transfer lines to be decreased. Since the image-pickup apparatus has the structure for establishing the plurality of potential wells having signal charges in the vertical transfer lines at a predetermined time, the signal charges can be transferred efficiently with keeping low driving speed of the vertical transfer lines.

Image-pickup apparatus and method for reading accumulated signal changes through transfer lines

A humanoid detector for detecting a humanoid in a surveillance area that substantially reduces false intruder indications by having two types of sensors that provide two types of information of the surveillance area, is disclosed. A first sensor detects light images and determines a size of a moving object within the surveillance area and compares the size of detected moving objects to a threshold size to reduce intruder detection caused by small animals. A second sensor detects infrared radiation from the surveillance area provides a detected infrared radiation signal. A decision circuit receives the sensor signals and provides a decision signal that indicates a human intruder in the surveillance area when, simultaneously, the size of the moving body is greater than that of a small animal and the detected infrared radiation indicates that the moving body is a heat producing body. In order to compensate for differences in the sensors and to account for different physical properties in the surveillance area, the decision circuit holds high an intruder signal for a predetermined time from each sensor. Thus, if a signal occurs that indicates a moving body is larger than a small animal, that signal is held for a predetermined time interval and if a signal indicates a sufficient increase in the infrared radiation occurs while the moving body signal is being held, then the decision circuit determines that a human intruder has entered the surveillance area. The decision signal may be used to trigger an audible or visible indication.

Humanoid detector and method that senses infrared radiation and subject

Optically readable radiation-displacement conversion devices and image-rendering apparatus that incorporate same are disclosed. Also disclosed are related methods for detecting images and rendering images using such devices and apparatus. Such devices, apparatus and methods allow improved accuracy and sensitivity of radiation detection without having to use a cooler. A representative conversion device includes a substrate and a suspended portion attached to the substrate via a leg portion. The conversion device includes a radiation-absorbing film that receives and absorbs and incident invisible radiation (e.g., UV, IR, or X-rays) and generates heat from the absorbed radiation. The suspended portion includes a displaceable member that exhibits a displacement with respect to the substrate. The displacement also imparts a change to an incident readout light flux in accordance with the magnitude of the displacement. The change to the readout light is detected and used to form an image.

Optically readable radiation-displacement-conversion devices and

Thermographic infrared cameras are disclosed that comprise an infrared image sensor having linearly positioned thermosensing elements. A physical property of each thermosensing element changes in proportion to a corresponding temperature change caused by infrared irradiation incident on the thermosensing element. The infrared image sensor comprises a read device that reads signals from each thermosensing element in an ordered manner. A logarithmic converter receives signals from the infrared image sensor and outputs corresponding logarithmic values of the signals. An image information output device receives the logarithmic values from the logarithmic converter and outputs a corresponding infrared image. Such thermographic infrared cameras can further comprise a reference infrared image sensor. The reference infrared image sensor includes reference thermosensing elements each having a physical property that exhibits a change in value in proportion to a temperature change of the respective thermosensing element. A compensating logarithmic converter outputs a logarithmic value of the ratio of the signal read by the infrared sensor and the signal read by the reference infrared sensor. An image information output device receives the logarithmic values output by the compensating logarithmic converter and outputs corresponding infrared image information.

Thermal camera for infrared imaging

An infrared ray detection device of this invention includes (i) a silicon substrate, (ii) a plurality of light-receiving portions which are disposed at predetermined intervals on one surface of the silicon substrate, and receive infrared rays, (iii) a plurality of reading portions which are disposed on the one surface of the silicon substrate at positions adjacent to the plurality of light-receiving portions, and read outputs from the plurality of light-receiving portions, and (iv) an impurity-doped silicon layer which are disposed in contact with the other surface of the silicon substrate and contains a donor or acceptor impurity at a concentration high enough to absorb infrared rays passing through the silicon substrate. Also, a solid-state imaging apparatus of this invention includes (1) a light detection device having detection sensitivity to light in a first wavelength region and light in a second wavelength region shorter than the first wavelength region, and (2) an adjustment mechanism which is disposed in front of the light detection device, consists of a member that transmits the light in the first wavelength region and shields the light in the second wavelength region, and adjusts the intensity of the light in the second wavelength region incident on the light detection device.

Infrared ray detection device and solid-state imaging apparatus

A power source is electrically connected to a capacitance element arranged corresponding to either a Shottky barrier diode (SBD) or a bolometer at a predetermined timing through a resistor by a driving pulse provided from a horizontal scanning circuit and a driving pulse provided from a vertical scanning circuit. At this time, charges charged by a voltage of the power source in the Shottky barrier diode are discharged by either a reverse current of the Shottky barrier diode or a current through the bolometer, immediately after the power source is disconnected from the capacitance element, arranged for either the Shottky barrier diode or the bolometer. After a storing period of time, when the power source and the capacitance element are connected, the charges corresponding to the charge amount discharged for the storing period of time are charged in the capacitance element. At this time, a voltage according to the charge amount is provided. Thus, an infrared-ray image sensor can be obtained using a Shottky barrier diode or a bolometer.

Infrared-ray image sensor

A solid state imaging device reduces the occurrence of crosstalk between a plurality of picture elements arranged in a linear or matrix form. The solid state imaging device includes a plurality of photosensitive cells formed on a first principal surface of a semiconductor substrate, a transfer electrode formed in a gap area among the cells on the first principal surface to read out charges produced in the cells, a drive metal wiring formed on the transfer electrode within the gap area, a first insulating film covering the cells with a predetermined thickness, and a plurality of metal reflecting films formed on the first insulating film so that the whole surface of each of the metal reflecting films forms a reflecting surface substantially parallel to a surface of each of the cells on the side of the first principal surface. Light passed through the photosensitive cells from a side opposite to the first principal surface is reflected back to each of the photosensitive cells.

Growing community of inventors

Kamakura, Japan

Keiichi Akagawa