Kawasaki Jukogyo Kabushiki Kaisha

Kei Watanabe

Akira Shoji

Yasuhiko Hashimoto

Yasuo Hirooka

Tadashi Shoji

Hideki Satou

Daisuke Ihara

Tomoaki Moromasa

Dai Fukuda

Among arbitrary positions on the course of a sealing gun, a position ahead of and separated from the arbitrary position in the moving direction of the sealing gun by a given distance, where an application part falls within a given allowable size in a direction perpendicular to the moving direction on the basis of the sealing gun, is a first position, and a position where the application part is deviated from the allowable size is a second position. A control device corrects the course of the sealing gun that is defined by an operation plan, based on the shape of the application part measured in a measurement point located at the first position.

Sealing robot

A liquid supply device which supplies liquid to a target object, comprises a cylinder having both ends closed; a piston which comparts an inner space of the cylinder into a first space and a second space, and is relatively slidable on an inner wall surface of the cylinder; a piston rod which extends to penetrate an end portion of the cylinder and has a tip end portion connected to the piston; a frame member to which a portion of the piston rod which is located outside the cylinder is fastened; a drive section which causes the cylinder to reciprocate in a direction in which the piston rod extends; a first flow line which is in communication with the first space to flow the liquid therethrough; and a second flow line which is in communication with the second space to flow the liquid therethrough.

Liquid supply device

A supporting structure is mounted on a hand body facing a circumferential edge of a substrate from below the substrate to support the substrate. First and second guiding members are mounted on the hand body, and having guiding surfaces in contact with an imaginary cylinder having an axis aligned with a reference axis of the hand body. First and second movable members are capable of moving in an imaginary plane perpendicular to the reference axis and are disposed on the radially outer-side of the circumferential edge of the substrate so as to face the circumferential edge. A driving unit simultaneously displaces the first and second movable members in the imaginary plane. The first and second guiding members and the first and second movable members are spaced apart on the circumference of the imaginary cylinder at intervals greater than the length of the arc of a segment in a substrate holding state.

Substrate holding device

Growing community of inventors

Kobe, Japan

Kei Watanabe