Sony Corporation

Canon Kabushiki Kaisha

Kei Takatsu

Shingo Kadomura

Shinsuke Hirano

Nobuyuki Suzuki

Hiroshi Sato

Junji Isohata

A method for producing an aluminum nitride/aluminum base composite material comprising the steps of; (A) charging aluminum nitride powder into a container provided in a molten metal pressure apparatus, (B) applying pressure to the aluminum nitride powder in the container, (C) pouring a molten aluminum base material into the container, and, (D) applying pressure to the molten aluminum base material in the container to fill the aluminum base material in space between the aluminum nitride powder particles.

Aluminum nitride/aluminum base composite material and a method for producing thereof

Aluminum nitride/aluminum base composite material and method of producing the same

The invention provides a substrate processing apparatus using a composite material which permits avoidance of occurrence of damages caused by the difference in thermal expansion between different materials and can be with stand the use at high temperatures. The substrate processing apparatus for processing a substrate is partially (for example, a substrate mounting stage) composed of a composite material consisting of a matrix comprising a ceramics member made of, for example, cordierite ceramics, aluminum nitride and/or a texture filled with an aluminum-based material (for example, aluminum or aluminum and silicon), and a ceramics layer (comprising, for example, Al O and/or AlN) provided on the surface of the matrix

COMPOSITE MATERIAL AND MANUFACTURING METHOD THEREOF, SUBSTRATE PROCESSING APPARATUS AND MANUFACTURING METHOD THEREOF, SUBSTRATE MOUNTING STAGE AND MANUFACTURING METHOD THEREOF, AND SUBSTRATE PROCESSING METHOD

A glass substrate processing apparatus, part of which comprises a composite material, the composite material being formed of a matrix and a ceramic layer formed on a surface of the matrix by a thermal spraying method, the matrix being formed of a ceramic member and an aluminum-containing material filled in a texture of the ceramic member.

Apparatus for processing glass substrate

An automatic wafer orienting apparatus comprising a first orienting device for driving and rotating a wafer thereby orienting the wafer while utilizing a peripheral edge and an orientation cut thereof as the guide, a device for disengaging the thus oriented wafer from the first wafer orienting device, and a second wafer orienting device for re-orienting the wafer by pressing a lateral edge and an orientation cut thereof against orienting members provided on a wafer chuck.

Growing community of inventors

Tokyo, Japan

Kei Takatsu