Kioxia Corporation

Fujifilm Business Innovation Corp.

Kabushiki Kaisha Toshiba

Kei Kobayashi

Taisuke Endo

Keigo Shinoto

Kei Otagiri

Hirokazu Kato

Yusuke Kasahara

Masayuki Hatano

Tetsuro Nakasugi

Kasumi Okabe

Maho Satani

Daizo Muto

A reading device includes a base on which a read target object is placed, a reader that reads the read target object placed on the base, a first attachment frame to which the reader is attached such that the reader is disposed above the base, an operation unit that is used for operating the reading device by touching, a second attachment frame to which the operation unit is attached such that the operation unit is disposed above the base, and a support frame that has a first surface and a second surface more bendable than the first surface in response to an external force. The first attachment frame is fixed to the first surface of the support frame. The second attachment frame is fixed to the second surface of the support frame.

Reading device and image forming apparatus

According to one embodiment, an imprint apparatus that presses a fine pattern of an original plate against a photo-curable resin dropped onto a substrate, and transfers the fine pattern to the photo-curable resin by applying light, includes a dropping unit that drops the photo-curable resin onto a shot region obtained by dividing the substrate into a plurality of sections, an original plate supporting unit that stamps the original plate on the photo-curable resin on the substrate, the original plate being supported the fine pattern towards the substrate side, and a substrate supporting unit that supports the substrate and moves the substrate such that a position of a predetermined shot region of the substrate is a dropping position of the dropping unit or a stamping position of the original plate, in which the dropping unit is controlled such that the photo-curable resin is sequentially dropped onto the plurality of shot regions of the substrate, and the original plate supporting unit is controlled such that the fine pattern is transferred by sequentially stamping the original plate on the photo-curable resin dropped onto the plurality of shot regions, while operating the substrate supporting unit.

Imprint apparatus, imprint method, and manufacturing method of semiconductor device

An imprint device includes a load port for receiving a substrate to be processed, a sensor that acquires information from the substrate about a film on the substrate, and a primer forming unit configured to receive the substrate from the load port. A controller is configured to select primer process conditions corresponding to the film information. The primer forming unit receives primer process conditions from the controller and forms a primer layer on the substrate over the film. The primer layer is formed according to the selected process conditions. An imprinting unit of the imprint device is configured to receive the substrate from the primer forming unit and perform imprint lithography on the substrate.

Imprint device, imprint method, and semiconductor device manufacturing method

A reading device includes a base on which a read target object is placed, a reader that reads the read target object placed on the base, a first attachment frame to which the reader is attached such that the reader is disposed above the base, an operation unit that is to be operated by a user, a second attachment frame to which a rear surface of the operation unit is attached such that the operation unit is disposed in front of the first attachment frame in a direction toward a front surface of the reading device, and a first cover that covers the second attachment frame. The first cover includes left and right rear cover components that are separately arranged at left and right sides of the first attachment frame serving as a dividing line at the rear surface of the operation unit and that cover at least a portion of the second attachment frame.

In accordance with an embodiment, a method of forming a pattern includes forming a first layer on a fabrication target film, making a mold and the first layer push each other to form a protrusion on the fabrication target film, and forming first and second regions, forming a block copolymer layer including first and second blocks in the first and second regions, phase-separating the block copolymer layer, forming second and third layers in the first region, and forming fourth and fifth layers in the second region; and removing the third and fifth layers. The first region is surrounded by the first layer and the protrusion. The second region is surrounded by the first layer and contacts the first region via the protrusion. The third layer is surrounded by the second layer. The fifth layer is surrounded by the fourth layer.

Growing community of inventors

Kanagawa, Japan

Kei Kobayashi